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Ee Beng, Arthur Tay

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Full Name
Ee Beng, Arthur Tay
Variants
Tay, Arthur
Tay, A.
Tay, E.B.
 
Main Affiliation
 
Faculty
 
Email
eletaya@nus.edu.sg
 

Publications

Results 21-40 of 112 (Search time: 0.004 seconds).

Issue DateTitleAuthor(s)
2115-Jan-2006Control of photoresist film thickness: Iterative feedback tuning approachTay, A. ; Khuen Ho, W. ; Deng, J.; Keng Lok, B.
22003Control of Photoresist Thickness Uniformity in the Microlithography ProcessTay, A. 
32009Control of semiconductor substrate temperature uniformity during photoresist processing in lithographyTay, A. ; Chua, H.-T.; Wang, Y.; Yang, G.
4Dec-2008Critical dimension and real-time temperature control for warped wafersHo, W.K. ; Tay, A. ; Fu, J. ; Chen, M.; Feng, Y.
5Nov-2007Critical dimension uniformity via real-time photoresist thickness controlHo, W.K. ; Tay, A. ; Chen, M.; Fu, J. ; Lu, H.; Shan, X.
6Aug-2003Design and implementation of a distributed evolutionary computing softwareTan, K.C. ; Tay, A. ; Cai, J.
72008Design-process integration for performance-based OPC frameworkTeh, S.-H.; Heng, C.-H. ; Tay, A. 
82004Detection of Wafer warpages during thermal processing in microlithographyHo, W.K. ; Tay, A. ; Zhou, Y.; Yang, K.; Hu, N.
92009Development of a framework and system for remote electronics experimentsTang, K.Z. ; Tan, K.K. ; Goh, Y.H.; Tay, A. ; Huang, S.N. ; Lee, T.H. 
102012Development of in-situ real-time CD monitoring and control system through PEB processYang, G.; Tay, A. ; Ho, W.K. 
112008Device performance-based OPC for optimal circuit performance and mask cost reductionTeh, S.-H.; Heng, C.-H. ; Tay, A. 
122008Direct measurement of beam size in a spectroscopic ellipsometry setupTay, A. ; Ng, T.W.; Wang, Y.; Zhao, S. 
132007Discovering Chinese chess strategies through coevolutionary approachesOng, C.S.; Quek, H.Y.; Tan, K.C. ; Tay, A. 
14Jan-2007Disturbance compensation incorporated in predictive control system using a repetitive learning approachTan, K.K. ; Huang, S.N. ; Lee, T.H. ; Tay, A. 
152003Dual Stage Actuator Control in Hard Disk Drive - A ReviewAl Mamun, A. ; Mareels, I.; Lee, T.H. ; Tay, A. 
16Dec-2011Dynamic game difficulty scaling using adaptive behavior-based AITan, C.H.; Tan, K.C. ; Tay, A. 
17Sep-2007Dynamic modeling and adaptive control of a H-type gantry stageTeo, C.S.; Tan, K.K. ; Lim, S.Y. ; Huang, S. ; Tay, E.B. 
182007Equipment design and control of advanced thermal processing system in lithographyTay, A. ; Wang, Y.; Chua, H.T.
19Mar-2010Equipment design and control of advanced thermal-processing module in lithographyTay, A. ; Chua, H.T.; Wang, Y.; Ngo, Y.S.
202010Equipment design and process control of critical dimensions in lithographyNgo, Y.S.; Yang, G.; Putra, A.S. ; Ang, K.T.; Tay, A. ; Fang, Z.P.