Please use this identifier to cite or link to this item:
|Title:||Direct measurement of beam size in a spectroscopic ellipsometry setup||Authors:||Tay, A.
|Issue Date:||2008||Citation:||Tay, A., Ng, T.W., Wang, Y., Zhao, S. (2008). Direct measurement of beam size in a spectroscopic ellipsometry setup. Review of Scientific Instruments 79 (6) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2936262||Abstract:||Spectroscopic ellipsometry signals used in thin film analysis are dependent on the beam probe size. In this work, we report a technique to determine the beam size that uses the existing detection facilities in a spectroscopic ellipsometry setup without the need to rearrange the optical components. The intensity signal recorded with the technique comprises a coupled boundary diffraction and knife edge wave that can be isolated using nonlinear fitting. This then permitted an accurate measurement of the beam size with the stronger knife edge component. The technique has the added advantage of picking up chromatic aberration in the probing lens which may be a factor in ellipsometry measurement. © 2008 American Institute of Physics.||Source Title:||Review of Scientific Instruments||URI:||http://scholarbank.nus.edu.sg/handle/10635/55652||ISSN:||00346748||DOI:||10.1063/1.2936262|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Jan 23, 2020
checked on Dec 30, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.