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TAY EE BENG,ARTHUR

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Full Name
TAY EE BENG,ARTHUR
Variants
Tay, Arthur
Tay, A.
Tay, E.B.
 
Main Affiliation
 
Faculty
 
Email
eletaya@nus.edu.sg
 

Publications

Results 1-20 of 120 (Search time: 0.005 seconds).

Issue DateTitleAuthor(s)
12008A competitive-cooperation coevolutionary paradigm for multi-objective optimizationGoh, C.K.; Tan, K.C. ; Tay, E.B. 
22007A cooperative coevolutionary algorithm for multiobjective particle swarm optimizationTan, C.H.; Goh, C.K.; Tan, K.C. ; Tay, A. 
31-Aug-2006A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithographyHu, N.; Tay, A. ; Tsai, K.-Y.
4Apr-2009A heater plate assisted bake/chill system for photoresist processing in photolithographyChua, H.T.; Tay, A. ; Wang, Y.; Wu, X.
52006A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processingTay, A. ; Chua, H.-T.; Wu, X.; Wang, Y.
6Feb-2007A lamp thermoelectricity based integrated bake/chill system for photoresist processingTay, A. ; Chua, H.T.; Wu, X.
7Apr-2009A new repetitive control for LTI systems with input delayTan, K.K. ; Zhao, S. ; Huang, S. ; Lee, T.H. ; Tay, A. 
82004A novel wafer baking system using hot air streamsLan, W.; Loong, C.S.; Poh, L.A. ; Ming, G.Z.; Wan, T.W. ; Tay, A. ; Khuen, H.W. 
92004A Robust Strategy for Joint Data Reconciliation and Parameter EstimationJoe, Y.Y.; Wang, D.; Ching, C.B.; Tay, A. ; Ho, W.K. ; Romagnoli, J.
102005A thermoelectricity-lamp based integrated bake/chill system for photoresist processingTay, A. ; Chua, H.-T.; Ho, W.-S.; Zhou, Y.
112009Adaptive game AI for gomokuTan, K.L.; Tan, C.H.; Tan, K.C. ; Tay, A. 
121-Apr-2010Adaptive library-based device performance-driven optical proximity correctionTeh, S.H.; Heng, C.H. ; Tay, A. 
13Feb-2007An in situ approach to real-time spatial control of steady-state wafer temperature during thermal processing in microlithographyTay, A. ; Ho, W.K. ; Hu, N.
14Feb-2010Bridging physics to electronics - An outreach effortTan, K.-K. ; Tang, K.-Z. ; Ng, V. ; Tay, A. ; Yen, S.-C. ; Lee, T.-H. 
152008CD uniformity control via real-time control of photoresist propertiesChen, M.; Fu, J. ; Ho, W.K. ; Tay, A. 
16Feb-2005Characterizing photolithographic linewidth sensitivity to process temperature variations for advanced resists using a thermal arraySchaper, C.D.; El-Awady, K.; Kailath, T.; Tay, A. ; Lee, L.L.; Ho, W.K. ; Fuller, S.E.
172005Combined data reconciliation and parameter estimationThian, B.S.; Joe, Y.Y.; Tay, A. ; Doan, X.-T.
18Jul-2010Computationally efficient behaviour based controller for real time car racing simulationTan, C.H.; Tan, K.C. ; Tay, A. 
19Feb-2004Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturingTay, A. ; Ho, W.K. ; Schaper, C.D.; Lee, L.L.
202002Control and signal processing for photoresist processing in microlithographyTay, A. ; Ho, W.K. ; Lim, K.W. ; Loh, A.P. ; Tan, W.W.