Fu Jun

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Full Name

Fu Jun

(not current staff)

Variants

Fu, J.

Main Affiliation

ELECTRICAL AND COMPUTER ENGINEERING

Faculty

FAC OF ENGINEERING

elefuj@nus.edu.sg

Other emails

ELEFUJ@nus.edu.sg

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	Issue Date	Title	Author(s)
1	2008	CD uniformity control via real-time control of photoresist properties	Chen, M.; Fu, J. ; Ho, W.K. ; Tay, A.
2	Dec-2008	Critical dimension and real-time temperature control for warped wafers	Ho, W.K. ; Tay, A. ; Fu, J. ; Chen, M.; Feng, Y.
3	Nov-2007	Critical dimension uniformity via real-time photoresist thickness control	Ho, W.K. ; Tay, A. ; Chen, M.; Fu, J. ; Lu, H.; Shan, X.
4	2005	Estimation of minimum conditions for forced oscillations in relay feedback systems	Lim, L.H.; Loh, A.P. ; Fu, J.
5	2004	Forced and subharmonic oscillations in relay feedback systems	Loh, A.P. ; Lim, L.H.; Fu, J. ; Fong, K.F.
6	2001	Spatially-programmable thermal processing module for 300 mm wafer processing	Tay, A. ; Khiang Wee Lim; Ai Poh Loh; Woei Wan Tan; Weng Khuen Ho; Huang, A. ; Fu, J.