Fu Jun

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Full Name

Fu Jun

(not current staff)

Variants

Fu, J.

Main Affiliation

ELECTRICAL AND COMPUTER ENGINEERING

Faculty

FAC OF ENGINEERING

elefuj@nus.edu.sg

Other emails

ELEFUJ@nus.edu.sg

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		Issue Date	Title	Author(s)
	1	Dec-2008	Critical dimension and real-time temperature control for warped wafers	Ho, W.K. ; Tay, A. ; Fu, J. ; Chen, M.; Feng, Y.
	2	Nov-2007	Critical dimension uniformity via real-time photoresist thickness control	Ho, W.K. ; Tay, A. ; Chen, M.; Fu, J. ; Lu, H.; Shan, X.