Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.2936262
DC FieldValue
dc.titleDirect measurement of beam size in a spectroscopic ellipsometry setup
dc.contributor.authorTay, A.
dc.contributor.authorNg, T.W.
dc.contributor.authorWang, Y.
dc.contributor.authorZhao, S.
dc.date.accessioned2014-06-17T02:45:34Z
dc.date.available2014-06-17T02:45:34Z
dc.date.issued2008
dc.identifier.citationTay, A., Ng, T.W., Wang, Y., Zhao, S. (2008). Direct measurement of beam size in a spectroscopic ellipsometry setup. Review of Scientific Instruments 79 (6) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2936262
dc.identifier.issn00346748
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/55652
dc.description.abstractSpectroscopic ellipsometry signals used in thin film analysis are dependent on the beam probe size. In this work, we report a technique to determine the beam size that uses the existing detection facilities in a spectroscopic ellipsometry setup without the need to rearrange the optical components. The intensity signal recorded with the technique comprises a coupled boundary diffraction and knife edge wave that can be isolated using nonlinear fitting. This then permitted an accurate measurement of the beam size with the stronger knife edge component. The technique has the added advantage of picking up chromatic aberration in the probing lens which may be a factor in ellipsometry measurement. © 2008 American Institute of Physics.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.2936262
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1063/1.2936262
dc.description.sourcetitleReview of Scientific Instruments
dc.description.volume79
dc.description.issue6
dc.description.page-
dc.description.codenRSINA
dc.identifier.isiut000257283700002
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