Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.2936262
Title: Direct measurement of beam size in a spectroscopic ellipsometry setup
Authors: Tay, A. 
Ng, T.W.
Wang, Y.
Zhao, S. 
Issue Date: 2008
Source: Tay, A., Ng, T.W., Wang, Y., Zhao, S. (2008). Direct measurement of beam size in a spectroscopic ellipsometry setup. Review of Scientific Instruments 79 (6) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2936262
Abstract: Spectroscopic ellipsometry signals used in thin film analysis are dependent on the beam probe size. In this work, we report a technique to determine the beam size that uses the existing detection facilities in a spectroscopic ellipsometry setup without the need to rearrange the optical components. The intensity signal recorded with the technique comprises a coupled boundary diffraction and knife edge wave that can be isolated using nonlinear fitting. This then permitted an accurate measurement of the beam size with the stronger knife edge component. The technique has the added advantage of picking up chromatic aberration in the probing lens which may be a factor in ellipsometry measurement. © 2008 American Institute of Physics.
Source Title: Review of Scientific Instruments
URI: http://scholarbank.nus.edu.sg/handle/10635/55652
ISSN: 00346748
DOI: 10.1063/1.2936262
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