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Weng Khuen Ho

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Full Name
Weng Khuen Ho
Variants
Ho, W.-K.
Ho, Weng-Khuen
Khuen, Ho Weng
Ho, M.
Ho, Weng Khuen
Khuen Ho, W.
Ho, W.Y.
Khuen, H.W.
Ho, W.K.
 
Main Affiliation
 
Faculty
 
Email
elehowk@nus.edu.sg
 

Publications

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Department:  ELECTRICAL AND COMPUTER ENGINEERING

Results 81-100 of 126 (Search time: 0.006 seconds).

Issue DateTitleAuthor(s)
811999Optimal control strategy using linear programming for load disturbance compensation in thermal processing systemsHo, Weng Khuen ; Tay, Arthur ; Schaper, Charles D.
8223-May-2007Optimal feed-forward control for multizone baking in microlithographyHo, W.K. ; Tay, A. ; Chen, M.; Kiew, C.M.
83Aug-1998Optimal gain and phase margin tuning for PID controllersHo, W.K. ; Lim, K.W. ; Xu, W.
84Aug-1998Optimal gain and phase margin tuning for PID controllersHo, W.K. ; Lim, K.W. ; Xu, W.
852000Optimal predictive control with constraints for the processing of semiconductor wafers on bake platesHo, W.K. ; Tay, A. ; Schaper, C.D.
861996Performance and gain and phase margins of well-known PID tuning formulasHo, W.K. ; Gan, O.P.; Tay, E.B. ; Ang, E.L.
871996Performance and gain and phase margins of well-known PID tuning formulasHo, W.K. ; Gan, O.P.; Tay, E.B. ; Ang, E.L.
881998PID tuning for unstable processes based on gain and phase-margin specificationsHo, W.K. ; Xu, W.
891998PID tuning for unstable processes based on gain and phase-margin specificationsHo, W.K. ; Xu, W.
90Jan-2004Processing chemically amplified resists on advanced photomasks using a thermal arraySchaper, C.D.; El-Awady, K.; Kailath, T.; Tay, A. ; Lee, L.L.; Ho, W.-K. ; Fuller, S.E.
912005Real-time control of photoresist absorption coefficient uniformityTay, A. ; Ho, W.-K. ; Wu, X.; Tsai, K.-Y.
922005Real-time control of photoresist development processTay, A. ; Ho, W.-K. ; Kiew, C.-M.; Zhou, Y.; Lee, J.H.
93Jan-2007Real-time control of photoresist extinction coefficient uniformity in the microlithography processTay, A. ; Ho, W.K. ; Wu, X.
942000Real-time control of photoresist thickness uniformity during the bake processLay, Lee Lay; Schaper, Charles; Khuen, Ho Weng 
952007Real-time estimation and control of photoresist properties in microlithographyWu, X.; Tay, A. ; Ho, W.K. ; Tan, K.K. 
962006Real-time monitoring of photoresist thickness contour in microlithographyHo, W.K. ; Chen, X.; Wu, X.; Tay, A. 
972007Real-time spatial control of photoresist development rateTay, A. ; Ho, W.-K. ; Hu, N.; Kiew, C.-M.; Tsai, K.-Y.
982006Real-time spatial control of steady-state wafer temperature during thermal processing in microlithographyTay, A. ; Ho, W.-K. ; Hu, N.; Tsai, K.-Y.; Zhou, Y.
991991Realization of an expert system based PID controller using industry standard software and hardware environmentsYue, P.K. ; Lee, T.H. ; Hang, C.C. ; Ho, W.K. 
1001991Realization of an expert system based PID controller using industry standard software and hardware environmentsYue, P.K. ; Lee, T.H. ; Hang, C.C. ; Ho, W.K.