Please use this identifier to cite or link to this item:
|Title:||Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates||Authors:||Ho, W.K.
|Issue Date:||2000||Citation:||Ho, W.K.,Tay, A.,Schaper, C.D. (2000). Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates. IEEE Transactions on Semiconductor Manufacturing 13 (1) : 88-96. ScholarBank@NUS Repository. https://doi.org/10.1109/66.827348||Abstract:||An optimal control scheme is designed to improve repeatability by minimizing the loading effects induced by the common processing condition of placement of a semiconductor wafer at ambient temperature on a large thermal-mass bake plate at processing temperature. The optimal control strategy is a model-based method using linear programming to minimize the worst-case deviation from a nominal temperature set point during the load disturbance condition. This results in a predictive controller that performs a predetermined heating sequence prior to the arrival of the wafer as part of the resulting feedforward/feedback strategy to eliminate the load disturbance. This procedure is based on an empirical model generated from data obtained during closed-loop operation. It is easy to design and implement for conventional thermal processing equipment. Experimental results are performed for a commercial conventional bake plate and depict an order-of-magnitude improvement in the settling time and the integral-square temperature error between the optimal predictive controller and a feedback controller for a typical load disturbance.||Source Title:||IEEE Transactions on Semiconductor Manufacturing||URI:||http://scholarbank.nus.edu.sg/handle/10635/62560||ISSN:||08946507||DOI:||10.1109/66.827348|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Sep 27, 2022
checked on Sep 22, 2022
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.