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Ee Beng, Arthur Tay

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Full Name
Ee Beng, Arthur Tay
Variants
Tay, Arthur
Tay, A.
Tay, E.B.
 
Main Affiliation
 
Faculty
 
Email
eletaya@nus.edu.sg
 

Publications

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Author:  Tay, A.

Results 81-100 of 118 (Search time: 0.006 seconds).

Issue DateTitleAuthor(s)
811999Optimal control strategy using linear programming for load disturbance compensation in thermal processing systemsHo, Weng Khuen ; Tay, Arthur ; Schaper, Charles D.
821999Optimal control strategy using linear programming for load disturbance compensation in thermal processing systemsHo, Weng Khuen ; Tay, Arthur ; Schaper, Charles D.
8323-May-2007Optimal feed-forward control for multizone baking in microlithographyHo, W.K. ; Tay, A. ; Chen, M.; Kiew, C.M.
842000Optimal predictive control with constraints for the processing of semiconductor wafers on bake platesHo, W.K. ; Tay, A. ; Schaper, C.D.
851996Performance and gain and phase margins of well-known PID tuning formulasHo, W.K. ; Gan, O.P.; Tay, E.B. ; Ang, E.L.
861996Performance and gain and phase margins of well-known PID tuning formulasHo, W.K. ; Gan, O.P.; Tay, E.B. ; Ang, E.L.
87Jan-2010Performance-based optical proximity correction methodologyTeh, S.-H.; Heng, C.-H. ; Tay, A. 
882007Piezo-assisted intra-cytoplasmic sperm injection: A comparative study of two penetration techniquesPutra, A.S. ; Huang, S. ; Tan, K.K. ; Panda, S.K. ; Lee, T.H. ; Tay, A. ; Ng, S.C. 
892009Predictive ratio control for interacting processesTan, K.K. ; Tay, A. ; Shao, Z. ; Huang, S. ; Lee, T.H. 
90Jan-2004Processing chemically amplified resists on advanced photomasks using a thermal arraySchaper, C.D.; El-Awady, K.; Kailath, T.; Tay, A. ; Lee, L.L.; Ho, W.-K. ; Fuller, S.E.
91Jun-2009Public goods provision: An evolutionary game theoretic study under asymmetric informationQuek, H.-Y.; Tan, K.C. ; Tay, A. 
922020Rapid Geriatric Assessment Using Mobile App in Primary Care: Prevalence of Geriatric Syndromes and Review of Its FeasibilityMerchant, R.A.; Hui, R.J.Y.; Kwek, S.C.; Sundram, M.; Tay, A. ; Jayasundram, J.; Chen, M.Z.; Ng, S.E.; Tan, L.F.; Morley, J.E.
932013RBF-based compensation method on displacement and thermal errorTan, K.K. ; Yang, R. ; Er, P.V.; Tay, A. ; Teo, C.S.
942005Real-time control of photoresist absorption coefficient uniformityTay, A. ; Ho, W.-K. ; Wu, X.; Tsai, K.-Y.
952005Real-time control of photoresist development processTay, A. ; Ho, W.-K. ; Kiew, C.-M.; Zhou, Y.; Lee, J.H.
96Jan-2007Real-time control of photoresist extinction coefficient uniformity in the microlithography processTay, A. ; Ho, W.K. ; Wu, X.
972008Real-time estimation and control of CD uniformity in lithographyTay, A. 
982007Real-time estimation and control of photoresist properties in microlithographyWu, X.; Tay, A. ; Ho, W.K. ; Tan, K.K. 
992006Real-time monitoring of photoresist thickness contour in microlithographyHo, W.K. ; Chen, X.; Wu, X.; Tay, A. 
1002007Real-time spatial control of photoresist development rateTay, A. ; Ho, W.-K. ; Hu, N.; Kiew, C.-M.; Tsai, K.-Y.