1. ScholarBank@NUS

Ee Beng, Arthur Tay

rp04194

Collaboration Map View Statistics Email Alert RSS Feed

Profile

Full Name
Ee Beng, Arthur Tay
Variants
Tay, Arthur
Tay, A.
Tay, E.B.
 
Main Affiliation
 
Faculty
 
Email
eletaya@nus.edu.sg
 

Publications

Refined By:
Author:  Tay, A.

Results 101-118 of 118 (Search time: 0.01 seconds).

Issue DateTitleAuthor(s)
1012006Real-time spatial control of steady-state wafer temperature during thermal processing in microlithographyTay, A. ; Ho, W.-K. ; Hu, N.; Tsai, K.-Y.; Zhou, Y.
1022018Regression analysis of gait parameters and mobility measures in a healthy cohort for subject-specific normative valuesMikos V. ; Yen S.-C. ; Tay A. ; Heng C.-H. ; Chung C.L.H.; Liew S.H.X.; Tan D.M.L. ; Au W.L. 
103Aug-2002Resist film uniformity in the microlithography processHo, W.K. ; Lee, L.L.; Tay, A. ; Schaper, C.
1042006Robust real-time thin film thickness estimationKiew, C.M.; Tay, A. ; Ho, W.K. ; Lim, K.W. ; Lee, J.H.
1052002Run-to-run process control for chemical mechanical polishing in semiconductor manufacturingDa, L.; Kumar, V.G.; Tay, A. ; Al Mamun, A. ; Ho, W.K. ; See, A.; Chan, L.
10620-Oct-2004Searching oligo sets of human chromosome 12 using evolutionary strategiesJoe, Y.-Y.; Tay, A. ; Dong, Z.-Y.; Ng, H.-H. ; Xu, H.
107May-2006Simple tilt and height location monitoring of wafersNg, T.W. ; Tay, A. ; Ong, C.J.
1082015Singapore Tele-technology Aided Rehabilitation in Stroke (STARS) trial: Protocol of a randomized clinical trial on tele-rehabilitation for stroke patientsKoh G.C.-H. ; Yen S.C. ; Tay A. ; Cheong A.; Ng Y.S.; De Silva D.A.; Png C.; Caves K.; Koh K.; Kumar Y.; Phan S.W.; Tai B.C. ; Chen C.; Chew E.; Chao Z.; Chua C.E.; Koh Y.S.; Hoenig H.
1092001Spatially-programmable thermal processing module for 300 mm wafer processingTay, A. ; Khiang Wee Lim; Ai Poh Loh; Woei Wan Tan; Weng Khuen Ho; Huang, A. ; Fu, J. 
11015-Jan-2009Spot focus size effect in spectroscopic ellipsometry of thin filmsNg, T.W.; Tay, A. ; Wang, Y.
1112013Study of web guide slippage phenomena in roll-to-roll embossing systeTan, H.; Wenjing, M.; Binglu, D.; Loong, C.S.; Meng, K.C.; Tay, A. 
112Feb-2007Temperature control and in situ fault detection of wafer warpageHo, W.K. ; Yap, C. ; Tay, A. ; Chen, W.; Zhou, Y.; Tan, W.W. ; Chen, M.
1132004Temperature control and in-situ fault detection of wafer warpageHo, W.K. ; Yap, C. ; Tay, A. ; Chen, W.; Lim, K.W.
114Mar-2003The intelligent alarm management systemLiu, J. ; Lim, K.W. ; Ho, W.K. ; Tan, K.C. ; Srinivasan, R. ; Tay, A. 
115Mar-2003The intelligent alarm management systemLiu, J. ; Lim, K.W. ; Ho, W.K. ; Tan, K.C. ; Srinivasan, R. ; Tay, A. 
1162010Timing performance oriented Optical proximity correction for mask cost reductionQu, Y.; Teh, S.H.; Heng, C.H. ; Tay, A. ; Lee, T.H. 
117Nov-2005Using the OPC standard for real-time process monitoring and controlLiu, J.; Lim, K.W.; Ho, W.K. ; Tan, K.C. ; Tay, A. ; Srinivasan, R. 
1182003Warpage Detection during Baking of Semiconductor substrate in MicrolithographyHo, W.K. ; Tay, A. ; Lim, K.W. ; Zhou, Y.; Yang, K.