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Pey Kin Leong

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Full Name
Pey Kin Leong
Variants
PEY, KIN-LEONG
PEY, KIN L.
LEONG, KIN
Pey, Kin Leong
PEY, KIN LEONG
Pey, K.L.
 
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Publications

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Author:  Ding, J.

Results 1-9 of 9 (Search time: 0.004 seconds).

Issue DateTitleAuthor(s)
12000Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopyLee, P.S.; Mangelinck, D.; Pey, K.L. ; Ding, J. ; Osipowicz, T. ; Ho, C.S.; Chen, G.L.; Chan, L.
2Sep-2002Effect of ion implantation on layer inversion of Ni silicided poly-SiLee, P.S.; Pey, K.L. ; Mangelinck, D.; Ding, J. ; Chi, D.Z.; Osipowicz, T. ; Dai, J.Y.; Chan, L.
3Jan-2002Enhanced stability of Ni monosilicide on MOSFETs poly-Si gate stackLee, P.S.; Mangelinck, D.; Pey, K.L. ; Ding, J. ; Chi, D.Z.; Osipowicz, T. ; Dai, J.Y.; See, A.
4Dec-2000Improved NiSi salicide process using presilicide N2 + implant for MOSFETsLee, P.S.; Pey, K.L. ; Mangelinck, D.; Ding, J. ; Wee, A.T.S. ; Chan, L.
5Mar-2002Layer inversion of Ni(Pt)Si on mixed phase Si filmsLee, P.S.; Pey, K.L. ; Mangelinck, D.; Ding, J. ; Osipowicz, T. ; See, A.
6Mar-2000Micro-Raman spectroscopy investigation of nickel silicides and nickel (platinum) silicidesLee, P.S.; Mangelinck, D.; Pey, K.L. ; Shen, Z.X. ; Ding, J. ; Osipowicz, T. ; See, A.
7Dec-2001New salicidation technology with Ni(Pt) alloy for MOSFETsLee, P.S.; Pey, K.L. ; Mangelinck, D.; Ding, J. ; Chi, D.Z.; Chan, L.
8Dec-2001Nickel silicide formation on Si(100) and poly-Si with a presilicide N2 + implantationLee, P.S.; Mangelinck, D.; Pey, K.L. ; Ding, J. ; Chi, D.Z.; Dai, J.Y.; See, A. 
9Jun-2002Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si linesLee, P.S.; Pey, K.L. ; Mangelinck, D.; Ding, J. ; Chi, D.Z.; Dai, J.Y.; Chan, L.