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Ee Beng, Arthur Tay

rp04194

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Full Name
Ee Beng, Arthur Tay
Variants
Tay, Arthur
Tay, A.
Tay, E.B.
 
Main Affiliation
 
Faculty
 
Email
eletaya@nus.edu.sg
 

Publications

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Author:  Tay, A.
Type:  Article
Date Issued:  [2000 TO 2009]

Results 1-20 of 38 (Search time: 0.006 seconds).

Issue DateTitleAuthor(s)
11-Aug-2006A fast in situ approach to estimating wafer warpage profile during thermal processing in microlithographyHu, N.; Tay, A. ; Tsai, K.-Y.
2Apr-2009A heater plate assisted bake/chill system for photoresist processing in photolithographyChua, H.T.; Tay, A. ; Wang, Y.; Wu, X.
3Feb-2007A lamp thermoelectricity based integrated bake/chill system for photoresist processingTay, A. ; Chua, H.T.; Wu, X.
4Apr-2009A new repetitive control for LTI systems with input delayTan, K.K. ; Zhao, S. ; Huang, S. ; Lee, T.H. ; Tay, A. 
52004A Robust Strategy for Joint Data Reconciliation and Parameter EstimationJoe, Y.Y.; Wang, D.; Ching, C.B.; Tay, A. ; Ho, W.K. ; Romagnoli, J.
6Feb-2007An in situ approach to real-time spatial control of steady-state wafer temperature during thermal processing in microlithographyTay, A. ; Ho, W.K. ; Hu, N.
7Feb-2005Characterizing photolithographic linewidth sensitivity to process temperature variations for advanced resists using a thermal arraySchaper, C.D.; El-Awady, K.; Kailath, T.; Tay, A. ; Lee, L.L.; Ho, W.K. ; Fuller, S.E.
8Feb-2004Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturingTay, A. ; Ho, W.K. ; Schaper, C.D.; Lee, L.L.
915-Jan-2006Control of photoresist film thickness: Iterative feedback tuning approachTay, A. ; Khuen Ho, W. ; Deng, J.; Keng Lok, B.
10Dec-2008Critical dimension and real-time temperature control for warped wafersHo, W.K. ; Tay, A. ; Fu, J. ; Chen, M.; Feng, Y.
11Nov-2007Critical dimension uniformity via real-time photoresist thickness controlHo, W.K. ; Tay, A. ; Chen, M.; Fu, J. ; Lu, H.; Shan, X.
12Aug-2003Design and implementation of a distributed evolutionary computing softwareTan, K.C. ; Tay, A. ; Cai, J.
132009Development of a framework and system for remote electronics experimentsTang, K.Z. ; Tan, K.K. ; Goh, Y.H.; Tay, A. ; Huang, S.N. ; Lee, T.H. 
142008Direct measurement of beam size in a spectroscopic ellipsometry setupTay, A. ; Ng, T.W.; Wang, Y.; Zhao, S. 
15Jan-2007Disturbance compensation incorporated in predictive control system using a repetitive learning approachTan, K.K. ; Huang, S.N. ; Lee, T.H. ; Tay, A. 
16Sep-2007Dynamic modeling and adaptive control of a H-type gantry stageTeo, C.S.; Tan, K.K. ; Lim, S.Y. ; Huang, S. ; Tay, E.B. 
17Jul-2005Estimation of wafer warpage profile during thermal processing in microlithographyTay, A. ; Ho, W.K. ; Hu, N.; Chen, X.
182009Evolving computer chinese chess using guided learningQuek, H.Y.; Chan, H.H.; Tan, K.C. ; Tay, A. 
19Mar-2009Evolving Nash-optimal poker strategies using evolutionary computationQuek, H.; Woo, C.; Tan, K. ; Tay, A. 
201-Nov-2006In situ measurement of wafer temperature using two sensors with different dynamical propertiesTan, W.W. ; Tang, J.C.; Loh, A.P. ; Tay, A.