Full Name
Seng Hwee Leng,Debbie
(not current staff)
Variants
Seng, H.L.
 
Main Affiliation
 
Faculty
 
Email
physengd@nus.edu.sg
 

Publications

Refined By:
Date Issued:  [2000 TO 2009]
Author:  Osipowicz, T.
Type:  Article

Results 1-11 of 11 (Search time: 0.004 seconds).

Issue DateTitleAuthor(s)
118-May-2001Characterisation of Ge nanocrystals in co-sputtered Ge+SiO2 system using raman spectroscopy, RBS and TEMHo, Y.W.; Ng, V. ; Choi, W.K. ; Ng, S.P.; Osipowicz, T. ; Seng, H.L. ; Tjui, W.W.; Li, K.
215-Dec-2001Diffusion barrier properties of ionized metal plasma deposited tantalum nitride thin films between copper and silicon dioxideLatt, K.M.; Lee, Y.K.; Seng, H.L. ; Osipowicz, T. 
37-Mar-2002Effect of the silicon nitride passivation layer on the Cu/Ta/SiO2/Si multi-layer structureLatt, K.M.; Park, H.S.; Seng, H.L. ; Osipowicz, T. ; Lee, Y.K.; Li, S.
46-Nov-2000Liquid-phase epitaxial growth of amorphous silicon during laser annealing of ultrashallow p+/n junctionsChong, Y.F.; Pey, K.L. ; Lu, Y.F. ; Wee, A.T.S. ; Osipowicz, T. ; Seng, H.L. ; See, A.; Dai, J.-Y.
522-Apr-2002Probing the SiGe virtual substrate by high-resolution channeling contrast microscopySeng, H.L. ; Osipowicz, T. ; Sum, T.C. ; Tok, E.S. ; Breton, G.; Woods, N.J.; Zhang, J.
6Nov-2001Rapid thermal oxidation of radio frequency sputtered polycrystalline Si1-xGex thin filmsNatarajan, A.; Bera, L.K. ; Choi, W.K. ; Osipowicz, T. ; Seng, H.L. 
71-Oct-2002Study on SiNx passivated Cu/Ta/SiO2/Si multilayer structureLatt, K.M.; Park, H.S.; Seng, H.L. ; Osipowicz, T. ; Lee, Y.K.
82006The CIBA high resolution RBS facilityOsipowicz, T. ; Seng, H.L. ; Chan, T.K.; Ho, B. 
9Aug-2006The CIBA high resolution RBS facilityOsipowicz, T. ; Seng, H.L. ; Chan, T.K. ; Ho, B.
1020-Jul-2001The impact of layer thickness of IMP-deposited tantalum nitride films on integrity of Cu/TaN/SiO2/Si multilayer structureLatt, K.M.; Lee, Y.K.; Li, S.; Osipowicz, T. ; Seng, H.L. 
11Dec-2003Via resistance reduction using "cool" PVD-Ta processingSeet, C.S.; Zhang, B.C.; Yong, C.; Liew, S.L.; Li, K.; Hsia, L.C.; Seng, H.L. ; Osiposwicz, T. ; Sudijono, J.; Zeng, H.C. ; Tan, J.B.