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Weng Khuen Ho

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Full Name
Weng Khuen Ho
Variants
Ho, W.-K.
Ho, Weng-Khuen
Khuen, Ho Weng
Ho, M.
Ho, Weng Khuen
Khuen Ho, W.
Ho, W.Y.
Khuen, H.W.
Ho, W.K.
 
Main Affiliation
 
Faculty
 
Email
elehowk@nus.edu.sg
 

Publications

Refined By:
Department:  ELECTRICAL AND COMPUTER ENGINEERING
Department:  ELECTRICAL & COMPUTER ENGINEERING
Type:  Conference Paper

Results 1-20 of 31 (Search time: 0.006 seconds).

Issue DateTitleAuthor(s)
12007A distributed co-evolutionary particle Swarm Optimization AlgorithmLiu, D.S.; Tan, K.C. ; Ho, W.K. 
22004A novel wafer baking system using hot air streamsLan, W.; Loong, C.S.; Poh, L.A. ; Ming, G.Z.; Wan, T.W. ; Tay, A. ; Khuen, H.W. 
32008CD uniformity control via real-time control of photoresist propertiesChen, M.; Fu, J. ; Ho, W.K. ; Tay, A. 
42007Clustering intelligent sensor nodes for distributed fault detection & diagnosisJoe, Y.Y.; Ho, W.K. ; Lim, K.W. ; Ding, Z.Q.; Zhang, J.B.; Ling, K.V.; Romagnoli, J.A.
52002Control and signal processing for photoresist processing in microlithographyTay, A. ; Ho, W.K. ; Lim, K.W. ; Loh, A.P. ; Tan, W.W. 
62004Detection of Wafer warpages during thermal processing in microlithographyHo, W.K. ; Tay, A. ; Zhou, Y.; Yang, K.; Hu, N.
72012Development of in-situ real-time CD monitoring and control system through PEB processYang, G.; Tay, A. ; Ho, W.K. 
82009Experimental evaluation of multiplexed MPC for semiconductor manufacturingLing, K.V.; Ho, W.K. ; Wu, B.; Aribowo, A.G.; Feng, Y.; Yan, H.
92004Fault detection and estimation of wafer warpage profile during thermal processing in microlithographyTay, A. ; Ho, W.K. ; Hu, N.; Zhou, Y.
102001Fault diagnosis using dynamic finite-state automaton modelsXi, Y.-X.; Lim, K.-W. ; Ho, W.-K. ; Preisig, H.A.
11Aug-2004In situ fault detection of wafer warpage in microlithographyHo, W.K. ; Tay, A. ; Zhou, Y.; Yang, K.
122005In-situ fault detection of wafer warpage in lithographyTay, A. ; Ho, W.K. ; Yap, C. ; Wei, C.; Tsai, K.-Y.
132005In-situ measurement & control of photoresist development in microlithographyKiew, C.M.; Tay, A. ; Ho, W.K. ; Lim, K.W. ; Zhou, Y.
142004In-situ measurement and control for photoresist processing in microlithographyTay, A. ; Ho, W.-K. ; Wu, X.; Kiew, C.-M.
152007In-situ monitoring of photoresist thickness contourHo, W.K. ; Wu, X.; Tay, A. ; Chen, X.
16May-2004Integrated bake/chill module with in situ temperature measurement for photoresist processingTay, A. ; Ho, W.-K. ; Loh, A.-P. ; Lim, K.-W. ; Tan, W.-W. ; Schaper, C.D.
172005Integrated metrology and processes for semiconductor manufacturingHo, W.K. ; Tay, A. ; Lim, K.W.; Loh, A.P. ; Tan, W.W. 
182007Iterative Feedback Tuning (IFT) of hard disk drive head positioning servomechanismAl Mamun, A. ; Ho, W.Y. ; Wang, W.E.; Lee, T.H. 
192007Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturingHo, W.K. ; Yan, H.; Romagnoli, J.A.; Ling, K.V.
20May-2010Multi-zone thermal processing in semiconductor manufacturing: Bias estimationYan, H.; Ho, W.K. ; Ling, K.V.; Lim, K.W.