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|Title:||Thermally robust TaTbxN metal gate electrode for n-MOSFETs applications||Authors:||Ren, C.
|Issue Date:||Feb-2005||Citation:||Ren, C., Yu, H.Y., Wang, X.P., Ma, H.H.H., Chan, D.S.H., Li, M.-F., Yeo, Y.-C., Tung, C.H., Balasubramanian, N., Huan, A.C.H., Pan, J.S., Kwong, D.-L. (2005-02). Thermally robust TaTbxN metal gate electrode for n-MOSFETs applications. IEEE Electron Device Letters 26 (2) : 75-77. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2004.841469||Abstract:||In this letter, we study Terbium (Tb)-incorporated TaN (TaTb xN) as a thermally robust N-type metal gate electrode for the first time. The work function of the Ta0.94Tb 0.06Ny metal gate is determined to be ∼ 4.23 eV after rapid thermal anneal at 1000 °C for 30 s, and can be further tuned by varying the Tb concentration. Moreover, the TaTb xN-SiO2 gate stack exhibits excellent thermal stability up to 1000 °C with no degradation to the equivalent oxide thickness, gate leakage, and time-dependent dielectric breakdown (TDDB) characteristics. These results suggest that Tb-incorporated TaN (TaTbxN) could be a promising metal gate candidate for n-MOSFET in a dual-metal gate Si CMOS process. © 2005 IEEE.||Source Title:||IEEE Electron Device Letters||URI:||http://scholarbank.nus.edu.sg/handle/10635/83197||ISSN:||07413106||DOI:||10.1109/LED.2004.841469|
|Appears in Collections:||Staff Publications|
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