1. ScholarBank@NUS

Ee Beng, Arthur Tay

rp04194

Collaboration Map View Statistics Email Alert RSS Feed

Profile

Full Name
Ee Beng, Arthur Tay
Variants
Tay, Arthur
Tay, A.
Tay, E.B.
 
Main Affiliation
 
Faculty
 
Email
eletaya@nus.edu.sg
 

Publications

Refined By:
Author:  Tay, A.
Type:  Conference Paper

Results 1-20 of 64 (Search time: 0.006 seconds).

Issue DateTitleAuthor(s)
12008A competitive-cooperation coevolutionary paradigm for multi-objective optimizationGoh, C.K.; Tan, K.C. ; Tay, E.B. 
22007A cooperative coevolutionary algorithm for multiobjective particle swarm optimizationTan, C.H.; Goh, C.K.; Tan, K.C. ; Tay, A. 
32006A lamp thermoelectricity based integrated bake/chill system for advanced photoresist processingTay, A. ; Chua, H.-T.; Wu, X.; Wang, Y.
42004A novel wafer baking system using hot air streamsLan, W.; Loong, C.S.; Poh, L.A. ; Ming, G.Z.; Wan, T.W. ; Tay, A. ; Khuen, H.W. 
52005A thermoelectricity-lamp based integrated bake/chill system for photoresist processingTay, A. ; Chua, H.-T.; Ho, W.-S.; Zhou, Y.
62009Adaptive game AI for gomokuTan, K.L.; Tan, C.H.; Tan, K.C. ; Tay, A. 
72008CD uniformity control via real-time control of photoresist propertiesChen, M.; Fu, J. ; Ho, W.K. ; Tay, A. 
82005Combined data reconciliation and parameter estimationThian, B.S.; Joe, Y.Y.; Tay, A. ; Doan, X.-T.
92002Control and signal processing for photoresist processing in microlithographyTay, A. ; Ho, W.K. ; Lim, K.W. ; Loh, A.P. ; Tan, W.W. 
102003Control of Photoresist Thickness Uniformity in the Microlithography ProcessTay, A. 
112009Control of semiconductor substrate temperature uniformity during photoresist processing in lithographyTay, A. ; Chua, H.-T.; Wang, Y.; Yang, G.
122008Design-process integration for performance-based OPC frameworkTeh, S.-H.; Heng, C.-H. ; Tay, A. 
132004Detection of Wafer warpages during thermal processing in microlithographyHo, W.K. ; Tay, A. ; Zhou, Y.; Yang, K.; Hu, N.
142012Development of in-situ real-time CD monitoring and control system through PEB processYang, G.; Tay, A. ; Ho, W.K. 
152008Device performance-based OPC for optimal circuit performance and mask cost reductionTeh, S.-H.; Heng, C.-H. ; Tay, A. 
162007Discovering Chinese chess strategies through coevolutionary approachesOng, C.S.; Quek, H.Y.; Tan, K.C. ; Tay, A. 
172003Dual Stage Actuator Control in Hard Disk Drive - A ReviewAl Mamun, A. ; Mareels, I.; Lee, T.H. ; Tay, A. 
182007Equipment design and control of advanced thermal processing system in lithographyTay, A. ; Wang, Y.; Chua, H.T.
192010Equipment design and process control of critical dimensions in lithographyNgo, Y.S.; Yang, G.; Putra, A.S. ; Ang, K.T.; Tay, A. ; Fang, Z.P.
202012Fast optical proximity correction with timing optimization ready standard cellsQu, Y.; Heng, C.H. ; Tay, A. ; Lee, T.H.