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Weng Khuen Ho

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Full Name
Weng Khuen Ho
Variants
Ho, W.-K.
Ho, Weng-Khuen
Khuen, Ho Weng
Ho, M.
Ho, Weng Khuen
Khuen Ho, W.
Ho, W.Y.
Khuen, H.W.
Ho, W.K.
 
Main Affiliation
 
Faculty
 
Email
elehowk@nus.edu.sg
 

Publications

Refined By:
Author:  Ho, W.K.
Department:  COLLEGE OF DESIGN AND ENGINEERING
Date Issued:  [2000 TO 2009]
Date Issued:  2007

Results 1-13 of 13 (Search time: 0.004 seconds).

Issue DateTitleAuthor(s)
12007A distributed co-evolutionary particle Swarm Optimization AlgorithmLiu, D.S.; Tan, K.C. ; Ho, W.K. 
2Feb-2007A multiobjective memetic algorithm based on particle swarm optimizationLiu, D.; Tan, K.C. ; Goh, C.K.; Ho, W.K. 
3Feb-2007An in situ approach to real-time spatial control of steady-state wafer temperature during thermal processing in microlithographyTay, A. ; Ho, W.K. ; Hu, N.
42007Clustering intelligent sensor nodes for distributed fault detection & diagnosisJoe, Y.Y.; Ho, W.K. ; Lim, K.W. ; Ding, Z.Q.; Zhang, J.B.; Ling, K.V.; Romagnoli, J.A.
5Nov-2007Critical dimension uniformity via real-time photoresist thickness controlHo, W.K. ; Tay, A. ; Chen, M.; Fu, J. ; Lu, H.; Shan, X.
62007In-situ monitoring of photoresist thickness contourHo, W.K. ; Wu, X.; Tay, A. ; Chen, X.
72007Iterative Feedback Tuning (IFT) of hard disk drive head positioning servomechanismAl Mamun, A. ; Ho, W.Y. ; Wang, W.E.; Lee, T.H. 
82007Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturingHo, W.K. ; Yan, H.; Romagnoli, J.A.; Ling, K.V.
923-May-2007Optimal feed-forward control for multizone baking in microlithographyHo, W.K. ; Tay, A. ; Chen, M.; Kiew, C.M.
10Jan-2007Real-time control of photoresist extinction coefficient uniformity in the microlithography processTay, A. ; Ho, W.K. ; Wu, X.
112007Real-time estimation and control of photoresist properties in microlithographyWu, X.; Tay, A. ; Ho, W.K. ; Tan, K.K. 
122007Real-time spatial control of photoresist development rateTay, A. ; Ho, W.-K. ; Hu, N.; Kiew, C.-M.; Tsai, K.-Y.
13Feb-2007Temperature control and in situ fault detection of wafer warpageHo, W.K. ; Yap, C. ; Tay, A. ; Chen, W.; Zhou, Y.; Tan, W.W. ; Chen, M.