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Ee Beng, Arthur Tay

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Full Name
Ee Beng, Arthur Tay
Variants
Tay, Arthur
Tay, A.
Tay, E.B.
 
Main Affiliation
 
Faculty
 
Email
eletaya@nus.edu.sg
 

Publications

Refined By:
Author:  Tay, A.
Date Issued:  [2010 TO 2020]

Results 1-20 of 25 (Search time: 0.005 seconds).

Issue DateTitleAuthor(s)
11-Apr-2010Adaptive library-based device performance-driven optical proximity correctionTeh, S.H.; Heng, C.H. ; Tay, A. 
2Feb-2010Bridging physics to electronics - An outreach effortTan, K.-K. ; Tang, K.-Z. ; Ng, V. ; Tay, A. ; Yen, S.-C. ; Lee, T.-H. 
3Jul-2010Computationally efficient behaviour based controller for real time car racing simulationTan, C.H.; Tan, K.C. ; Tay, A. 
42012Development of in-situ real-time CD monitoring and control system through PEB processYang, G.; Tay, A. ; Ho, W.K. 
5Dec-2011Dynamic game difficulty scaling using adaptive behavior-based AITan, C.H.; Tan, K.C. ; Tay, A. 
6Mar-2010Equipment design and control of advanced thermal-processing module in lithographyTay, A. ; Chua, H.T.; Wang, Y.; Ngo, Y.S.
72010Equipment design and process control of critical dimensions in lithographyNgo, Y.S.; Yang, G.; Putra, A.S. ; Ang, K.T.; Tay, A. ; Fang, Z.P.
82012Fast optical proximity correction with timing optimization ready standard cellsQu, Y.; Heng, C.H. ; Tay, A. ; Lee, T.H. 
92010Feedback control applied to improve convergence of performance-based optical proximity correction in advanced lithographyQu, Y.; Tay, A. ; Lee, T.H. 
102012In-situ critical dimension control during post-exposure bake with spectroscopic ellipsometryNgo, Y.S.; Qu, Y.; Tay, A. ; Lee, T.H. 
112011Iterative feedback tuning of optical proximity correction mask in lithographyQu, Y.; Tay, A. ; Lee, T.H. 
122010Library-based performance-based OPCTeh, S.-H.; Heng, C.-H. ; Tay, A. 
13Jan-2013Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental resultsNgo, Y.S.; Ang, K.T.; Tay, A. 
143-Apr-2013Modeling and real-time control of multizone thermal processing system for photoresist processingTay, A. ; Chua, H.T.; Yuheng, W.; Geng, Y.; Khuen, H.W. 
152010Monitoring and control of photoresist properties and CD during photoresist processingYang, G.; Ngo, Y.-S.; Putra, A.S. ; Ang, K.-T.; Tay, A. ; Fang, Z.-P.
162010Monitoring and control of photoresist properties and CD during photoresist processingYang, G.; Ngo, Y.-S.; Putra, A.S. ; Ang, K.-T.; Tay, A. ; Fang, Z.-P.
17Feb-2014Note: Real time three-dimensional topography measurement of microfluidic devices with pillar structures using confocal microscopeAng, K.T.; Fang, Z.P.; Tay, A. 
182013OPC mask simplification using over-designed timing slack of standard cellsQu, Y.; Heng, C.H. ; Tay, A. ; Lee, T.H. 
19Jan-2010Performance-based optical proximity correction methodologyTeh, S.-H.; Heng, C.-H. ; Tay, A. 
202020Rapid Geriatric Assessment Using Mobile App in Primary Care: Prevalence of Geriatric Syndromes and Review of Its FeasibilityMerchant, R.A.; Hui, R.J.Y.; Kwek, S.C.; Sundram, M.; Tay, A. ; Jayasundram, J.; Chen, M.Z.; Ng, S.E.; Tan, L.F.; Morley, J.E.