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Ee Beng, Arthur Tay

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Full Name
Ee Beng, Arthur Tay
Variants
Tay, Arthur
Tay, A.
Tay, E.B.
 
Main Affiliation
 
Faculty
 
Email
eletaya@nus.edu.sg
 

Publications

Results 61-80 of 112 (Search time: 0.004 seconds).

Issue DateTitleAuthor(s)
612011Iterative feedback tuning of optical proximity correction mask in lithographyQu, Y.; Tay, A. ; Lee, T.H. 
2Jul-1998Knowledge-based multivariable PID controlHo, W.K. ; Lee, T.H. ; Tay, E.B. 
32010Library-based performance-based OPCTeh, S.-H.; Heng, C.-H. ; Tay, A. 
4Jan-2013Method for real-time critical dimensions signature monitoring and control: Sensor, actuator, and experimental resultsNgo, Y.S.; Ang, K.T.; Tay, A. 
5Nov-2001Minimum time control of conductive heating systems for microelectronics processingTay, A. ; Ho, W.K. ; Poh, Y.P.
62000Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasksHo, W.K. ; Tay, A. 
72002Mining multiple comprehensible classification rules using genetic programmingTan, K.C. ; Tay, A. ; Lee, T.H. ; Heng, C.M.
82008Mobile real-time feedback system for educationTan, K.K. ; Tay, E.B. ; Ong, K.C.; Leong, C.-Y.
93-Apr-2013Modeling and real-time control of multizone thermal processing system for photoresist processingTay, A. ; Chua, H.T.; Yuheng, W.; Geng, Y.; Khuen, H.W. 
102010Monitoring and control of photoresist properties and CD during photoresist processingYang, G.; Ngo, Y.-S.; Putra, A.S. ; Ang, K.-T.; Tay, A. ; Fang, Z.-P.
112010Monitoring and control of photoresist properties and CD during photoresist processingYang, G.; Ngo, Y.-S.; Putra, A.S. ; Ang, K.-T.; Tay, A. ; Fang, Z.-P.
122009Neural network versus behavior based approach in simulated car racing gameTang, H.; Tan, C.H.; Tan, K.C. ; Tay, A. 
13Feb-2014Note: Real time three-dimensional topography measurement of microfluidic devices with pillar structures using confocal microscopeAng, K.T.; Fang, Z.P.; Tay, A. 
14Jul-2004On control of resist film uniformity in the microlithography processHo, W.K. ; Tay, A. ; Lee, L.L.; Schaper, C.D.
152008Online adaptive controller for simulated car racingTan, C.H.; Ang, J.H.; Tan, K.C. ; Tay, A. 
162013OPC mask simplification using over-designed timing slack of standard cellsQu, Y.; Heng, C.H. ; Tay, A. ; Lee, T.H. 
171999Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasksHo, Weng Khuen ; Tay, Arthur ; Schaper, Charles D.
181999Optimal control strategy using linear programming for load disturbance compensation in thermal processing systemsHo, Weng Khuen ; Tay, Arthur ; Schaper, Charles D.
1923-May-2007Optimal feed-forward control for multizone baking in microlithographyHo, W.K. ; Tay, A. ; Chen, M.; Kiew, C.M.
202000Optimal predictive control with constraints for the processing of semiconductor wafers on bake platesHo, W.K. ; Tay, A. ; Schaper, C.D.