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Weng Khuen Ho

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Full Name
Weng Khuen Ho
Variants
Ho, W.-K.
Ho, Weng-Khuen
Khuen, Ho Weng
Ho, M.
Ho, Weng Khuen
Khuen Ho, W.
Ho, W.Y.
Khuen, H.W.
Ho, W.K.
 
Main Affiliation
 
Faculty
 
Email
elehowk@nus.edu.sg
 

Publications

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Department:  ELECTRICAL AND COMPUTER ENGINEERING
Department:  ELECTRICAL & COMPUTER ENGINEERING

Results 1-20 of 72 (Search time: 0.006 seconds).

Issue DateTitleAuthor(s)
12007A distributed co-evolutionary particle Swarm Optimization AlgorithmLiu, D.S.; Tan, K.C. ; Ho, W.K. 
2Feb-2007A multiobjective memetic algorithm based on particle swarm optimizationLiu, D.; Tan, K.C. ; Goh, C.K.; Ho, W.K. 
32004A novel wafer baking system using hot air streamsLan, W.; Loong, C.S.; Poh, L.A. ; Ming, G.Z.; Wan, T.W. ; Tay, A. ; Khuen, H.W. 
42004A Robust Strategy for Joint Data Reconciliation and Parameter EstimationJoe, Y.Y.; Wang, D.; Ching, C.B.; Tay, A. ; Ho, W.K. ; Romagnoli, J.
5Feb-2007An in situ approach to real-time spatial control of steady-state wafer temperature during thermal processing in microlithographyTay, A. ; Ho, W.K. ; Hu, N.
62008CD uniformity control via real-time control of photoresist propertiesChen, M.; Fu, J. ; Ho, W.K. ; Tay, A. 
7Feb-2005Characterizing photolithographic linewidth sensitivity to process temperature variations for advanced resists using a thermal arraySchaper, C.D.; El-Awady, K.; Kailath, T.; Tay, A. ; Lee, L.L.; Ho, W.K. ; Fuller, S.E.
82007Clustering intelligent sensor nodes for distributed fault detection & diagnosisJoe, Y.Y.; Ho, W.K. ; Lim, K.W. ; Ding, Z.Q.; Zhang, J.B.; Ling, K.V.; Romagnoli, J.A.
9Feb-2004Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturingTay, A. ; Ho, W.K. ; Schaper, C.D.; Lee, L.L.
10Feb-2005Context-based recognition of process states using neural networksSrinivasan, R. ; Wang, C.; Ho, W.K. ; Lim, K.W. 
112002Control and signal processing for photoresist processing in microlithographyTay, A. ; Ho, W.K. ; Lim, K.W. ; Loh, A.P. ; Tan, W.W. 
1215-Jan-2006Control of photoresist film thickness: Iterative feedback tuning approachTay, A. ; Khuen Ho, W. ; Deng, J.; Keng Lok, B.
13Dec-2008Critical dimension and real-time temperature control for warped wafersHo, W.K. ; Tay, A. ; Fu, J. ; Chen, M.; Feng, Y.
14Nov-2007Critical dimension uniformity via real-time photoresist thickness controlHo, W.K. ; Tay, A. ; Chen, M.; Fu, J. ; Lu, H.; Shan, X.
152004Detection of Wafer warpages during thermal processing in microlithographyHo, W.K. ; Tay, A. ; Zhou, Y.; Yang, K.; Hu, N.
162012Development of in-situ real-time CD monitoring and control system through PEB processYang, G.; Tay, A. ; Ho, W.K. 
1728-Apr-2004Dynamic Principal Component Analysis Based Methodology for Clustering Process States in Agile Chemical PlantsSrinivasan, R. ; Wang, C.; Ho, W.K. ; Lim, K.W. 
18Dec-2008EditorialQin, S.J.; Hsieh, M.; Epstein, D.J.; Ho, W.K. 
19Dec-2008EditorialQin, S.J.; Hsieh, M.; Epstein, D.J.; Ho, W.K. 
20Jul-2005Estimation of wafer warpage profile during thermal processing in microlithographyTay, A. ; Ho, W.K. ; Hu, N.; Chen, X.