Please use this identifier to cite or link to this item:
|Title:||Optimal geometry for GeSi/Si super-lattice structure RBS investigation||Authors:||Wielunski, L.S.
Glancing angle detection
|Issue Date:||May-2002||Citation:||Wielunski, L.S., Osipowicz, T., Teo, E.J., Watt, F., Tok, E.S., Zhang, J. (2002-05). Optimal geometry for GeSi/Si super-lattice structure RBS investigation. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 190 (1-4) : 414-418. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(01)01218-6||Abstract:||He Rutherford Backscattering Spectrometry (RBS) depth resolution is limited by detector energy resolution, He ion energy loss in the sample material, energy straggling and geometry of the experiment. Examples of experimental results are shown for GeSi/Si super-lattice investigation for random and channeling RBS analysis in different geometry of detection. Different detection geometries are discussed and compared. For the case of axial channeling experiments, the incident beam direction is restricted to typically low index axes only. It is shown how to improve the depth resolution and sensitivity in this type of experiments. Effects of sample material as well as contributions from different physical processes including multiple scattering effects are discussed in some detail. © 2002 Elsevier Science B.V. All rights reserved.||Source Title:||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms||URI:||http://scholarbank.nus.edu.sg/handle/10635/77474||ISSN:||0168583X||DOI:||10.1016/S0168-583X(01)01218-6|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Feb 17, 2020
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.