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https://doi.org/10.1016/S0168-583X(01)01218-6
| Title: | Optimal geometry for GeSi/Si super-lattice structure RBS investigation | Authors: | Wielunski, L.S. Osipowicz, T. Teo, E.J. Watt, F. Tok, E.S. Zhang, J. |
Keywords: | Channeling Depth resolution GeSi/Si super-lattice Glancing angle detection He RBS Muliple scattering |
Issue Date: | May-2002 | Citation: | Wielunski, L.S., Osipowicz, T., Teo, E.J., Watt, F., Tok, E.S., Zhang, J. (2002-05). Optimal geometry for GeSi/Si super-lattice structure RBS investigation. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 190 (1-4) : 414-418. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(01)01218-6 | Abstract: | He Rutherford Backscattering Spectrometry (RBS) depth resolution is limited by detector energy resolution, He ion energy loss in the sample material, energy straggling and geometry of the experiment. Examples of experimental results are shown for GeSi/Si super-lattice investigation for random and channeling RBS analysis in different geometry of detection. Different detection geometries are discussed and compared. For the case of axial channeling experiments, the incident beam direction is restricted to typically low index axes only. It is shown how to improve the depth resolution and sensitivity in this type of experiments. Effects of sample material as well as contributions from different physical processes including multiple scattering effects are discussed in some detail. © 2002 Elsevier Science B.V. All rights reserved. | Source Title: | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | URI: | http://scholarbank.nus.edu.sg/handle/10635/77474 | ISSN: | 0168583X | DOI: | 10.1016/S0168-583X(01)01218-6 |
| Appears in Collections: | Staff Publications |
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