Please use this identifier to cite or link to this item: https://doi.org/10.1016/S0168-583X(01)01218-6
Title: Optimal geometry for GeSi/Si super-lattice structure RBS investigation
Authors: Wielunski, L.S.
Osipowicz, T. 
Teo, E.J. 
Watt, F. 
Tok, E.S. 
Zhang, J.
Keywords: Channeling
Depth resolution
GeSi/Si super-lattice
Glancing angle detection
He RBS
Muliple scattering
Issue Date: May-2002
Source: Wielunski, L.S., Osipowicz, T., Teo, E.J., Watt, F., Tok, E.S., Zhang, J. (2002-05). Optimal geometry for GeSi/Si super-lattice structure RBS investigation. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 190 (1-4) : 414-418. ScholarBank@NUS Repository. https://doi.org/10.1016/S0168-583X(01)01218-6
Abstract: He Rutherford Backscattering Spectrometry (RBS) depth resolution is limited by detector energy resolution, He ion energy loss in the sample material, energy straggling and geometry of the experiment. Examples of experimental results are shown for GeSi/Si super-lattice investigation for random and channeling RBS analysis in different geometry of detection. Different detection geometries are discussed and compared. For the case of axial channeling experiments, the incident beam direction is restricted to typically low index axes only. It is shown how to improve the depth resolution and sensitivity in this type of experiments. Effects of sample material as well as contributions from different physical processes including multiple scattering effects are discussed in some detail. © 2002 Elsevier Science B.V. All rights reserved.
Source Title: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
URI: http://scholarbank.nus.edu.sg/handle/10635/77474
ISSN: 0168583X
DOI: 10.1016/S0168-583X(01)01218-6
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