Design and characterisation of a single-reflection, solid-state detector with high discrimination against backscattered electrons for cathodoluminescence microscopy

Abstract

A portable solid-state detector (SSD) for cathodoluminescence (CL) has been constructed and tested. The detector geometry utilises a parabolic reflector to direct light towards the solid-state detection element. The photo-sensitive area of the solid-state photodiodes is situated at a level in line with or sightly below the top surface of the specimen to minimise the collection of backscattered electrons (BSEs) coming directly from the beam impact point. The components have been integrated into a single unit to enhance portability. In comparison with a commercial CL detection system, the new geometry shows excellent efficiency in rejecting BSE contribution during CL operation. A light collection solid angle close to 1.97π steradian is realised in this geometry, higher than other SSD-CL systems. A method for characterising CL detection system performance has been developed.