Please use this identifier to cite or link to this item: https://doi.org/10.3390/mi11010007
Title: Development Trends and Perspectives of Future Sensors and MEMS/NEMS
Authors: Zhu, Jianxiong 
Liu, Xinmiao 
Shi, Qiongfeng 
He, Tianyiyi 
Sun, Zhongda
Guo, Xinge
Liu, Weixin 
Bin Sulaiman, Othman
Dong, Bowei 
Lee, Chengkuo 
Keywords: Science & Technology
Physical Sciences
Technology
Chemistry, Analytical
Nanoscience & Nanotechnology
Instruments & Instrumentation
Physics, Applied
Chemistry
Science & Technology - Other Topics
Physics
MEMS sensor
zero-power sensor
flexible sensor
human-machine interface
machine learning
artificial intelligence
CAPACITIVE MEMS ACCELEROMETER
TRIBOELECTRIC NANOGENERATOR
ENERGY HARVESTER
LOW-NOISE
MICRO
POWER
GAS
INTERFACE
SINGLE
CALIBRATION
Issue Date: 1-Jan-2020
Publisher: MDPI
Citation: Zhu, Jianxiong, Liu, Xinmiao, Shi, Qiongfeng, He, Tianyiyi, Sun, Zhongda, Guo, Xinge, Liu, Weixin, Bin Sulaiman, Othman, Dong, Bowei, Lee, Chengkuo (2020-01-01). Development Trends and Perspectives of Future Sensors and MEMS/NEMS. MICROMACHINES 11 (1). ScholarBank@NUS Repository. https://doi.org/10.3390/mi11010007
Abstract: With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings' manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.
Source Title: MICROMACHINES
URI: https://scholarbank.nus.edu.sg/handle/10635/189502
ISSN: 2072666X
DOI: 10.3390/mi11010007
Appears in Collections:Staff Publications
Elements

Show full item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
Development Trends and Perspectives of Future Sensors and MEMSNEMS.pdfAccepted version8.9 MBAdobe PDF

OPEN

PublishedView/Download

SCOPUSTM   
Citations

31
checked on May 2, 2021

Page view(s)

19
checked on May 6, 2021

Download(s)

1
checked on May 6, 2021

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.