Please use this identifier to cite or link to this item: https://doi.org/10.3390/mi11010007
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dc.titleDevelopment Trends and Perspectives of Future Sensors and MEMS/NEMS
dc.contributor.authorZhu, Jianxiong
dc.contributor.authorLiu, Xinmiao
dc.contributor.authorShi, Qiongfeng
dc.contributor.authorHe, Tianyiyi
dc.contributor.authorSun, Zhongda
dc.contributor.authorGuo, Xinge
dc.contributor.authorLiu, Weixin
dc.contributor.authorBin Sulaiman, Othman
dc.contributor.authorDong, Bowei
dc.contributor.authorLee, Chengkuo
dc.date.accessioned2021-04-16T07:16:23Z
dc.date.available2021-04-16T07:16:23Z
dc.date.issued2020-01-01
dc.identifier.citationZhu, Jianxiong, Liu, Xinmiao, Shi, Qiongfeng, He, Tianyiyi, Sun, Zhongda, Guo, Xinge, Liu, Weixin, Bin Sulaiman, Othman, Dong, Bowei, Lee, Chengkuo (2020-01-01). Development Trends and Perspectives of Future Sensors and MEMS/NEMS. MICROMACHINES 11 (1). ScholarBank@NUS Repository. https://doi.org/10.3390/mi11010007
dc.identifier.issn2072666X
dc.identifier.urihttps://scholarbank.nus.edu.sg/handle/10635/189502
dc.description.abstractWith the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings' manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.
dc.language.isoen
dc.publisherMDPI
dc.sourceElements
dc.subjectScience & Technology
dc.subjectPhysical Sciences
dc.subjectTechnology
dc.subjectChemistry, Analytical
dc.subjectNanoscience & Nanotechnology
dc.subjectInstruments & Instrumentation
dc.subjectPhysics, Applied
dc.subjectChemistry
dc.subjectScience & Technology - Other Topics
dc.subjectPhysics
dc.subjectMEMS sensor
dc.subjectzero-power sensor
dc.subjectflexible sensor
dc.subjecthuman-machine interface
dc.subjectmachine learning
dc.subjectartificial intelligence
dc.subjectCAPACITIVE MEMS ACCELEROMETER
dc.subjectTRIBOELECTRIC NANOGENERATOR
dc.subjectENERGY HARVESTER
dc.subjectLOW-NOISE
dc.subjectMICRO
dc.subjectPOWER
dc.subjectGAS
dc.subjectINTERFACE
dc.subjectSINGLE
dc.subjectCALIBRATION
dc.typeReview
dc.date.updated2021-04-16T05:02:54Z
dc.contributor.departmentELECTRICAL AND COMPUTER ENGINEERING
dc.description.doi10.3390/mi11010007
dc.description.sourcetitleMICROMACHINES
dc.description.volume11
dc.description.issue1
dc.published.statePublished
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