Please use this identifier to cite or link to this item:
https://doi.org/10.3390/mi11010007
DC Field | Value | |
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dc.title | Development Trends and Perspectives of Future Sensors and MEMS/NEMS | |
dc.contributor.author | Zhu, Jianxiong | |
dc.contributor.author | Liu, Xinmiao | |
dc.contributor.author | Shi, Qiongfeng | |
dc.contributor.author | He, Tianyiyi | |
dc.contributor.author | Sun, Zhongda | |
dc.contributor.author | Guo, Xinge | |
dc.contributor.author | Liu, Weixin | |
dc.contributor.author | Bin Sulaiman, Othman | |
dc.contributor.author | Dong, Bowei | |
dc.contributor.author | Lee, Chengkuo | |
dc.date.accessioned | 2021-04-16T07:16:23Z | |
dc.date.available | 2021-04-16T07:16:23Z | |
dc.date.issued | 2020-01-01 | |
dc.identifier.citation | Zhu, Jianxiong, Liu, Xinmiao, Shi, Qiongfeng, He, Tianyiyi, Sun, Zhongda, Guo, Xinge, Liu, Weixin, Bin Sulaiman, Othman, Dong, Bowei, Lee, Chengkuo (2020-01-01). Development Trends and Perspectives of Future Sensors and MEMS/NEMS. MICROMACHINES 11 (1). ScholarBank@NUS Repository. https://doi.org/10.3390/mi11010007 | |
dc.identifier.issn | 2072666X | |
dc.identifier.uri | https://scholarbank.nus.edu.sg/handle/10635/189502 | |
dc.description.abstract | With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings' manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios. | |
dc.language.iso | en | |
dc.publisher | MDPI | |
dc.source | Elements | |
dc.subject | Science & Technology | |
dc.subject | Physical Sciences | |
dc.subject | Technology | |
dc.subject | Chemistry, Analytical | |
dc.subject | Nanoscience & Nanotechnology | |
dc.subject | Instruments & Instrumentation | |
dc.subject | Physics, Applied | |
dc.subject | Chemistry | |
dc.subject | Science & Technology - Other Topics | |
dc.subject | Physics | |
dc.subject | MEMS sensor | |
dc.subject | zero-power sensor | |
dc.subject | flexible sensor | |
dc.subject | human-machine interface | |
dc.subject | machine learning | |
dc.subject | artificial intelligence | |
dc.subject | CAPACITIVE MEMS ACCELEROMETER | |
dc.subject | TRIBOELECTRIC NANOGENERATOR | |
dc.subject | ENERGY HARVESTER | |
dc.subject | LOW-NOISE | |
dc.subject | MICRO | |
dc.subject | POWER | |
dc.subject | GAS | |
dc.subject | INTERFACE | |
dc.subject | SINGLE | |
dc.subject | CALIBRATION | |
dc.type | Review | |
dc.date.updated | 2021-04-16T05:02:54Z | |
dc.contributor.department | ELECTRICAL AND COMPUTER ENGINEERING | |
dc.description.doi | 10.3390/mi11010007 | |
dc.description.sourcetitle | MICROMACHINES | |
dc.description.volume | 11 | |
dc.description.issue | 1 | |
dc.published.state | Published | |
Appears in Collections: | Staff Publications Elements |
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File | Description | Size | Format | Access Settings | Version | |
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Development Trends and Perspectives of Future Sensors and MEMSNEMS.pdf | Accepted version | 8.9 MB | Adobe PDF | OPEN | Published | View/Download |
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