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https://scholarbank.nus.edu.sg/handle/10635/98970
| Title: | Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer | Authors: | Ng, S.C. Taijing, L. |
Issue Date: | Jul-1993 | Citation: | Ng, S.C.,Taijing, L. (1993-07). Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer. Journal of Crystal Growth 131 (1-2) : 265-267. ScholarBank@NUS Repository. | Abstract: | The ring-bands of oxidation stacking faults (OSFs) in silicon wafers were detected nondestructively using a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer. © 1993. | Source Title: | Journal of Crystal Growth | URI: | http://scholarbank.nus.edu.sg/handle/10635/98970 | ISSN: | 00220248 |
| Appears in Collections: | Staff Publications |
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