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Title: Three-dimensional nanolithography using proton beam writing
Authors: Van Kan, J.A. 
Bettiol, A.A. 
Watt, F. 
Issue Date: 25-Aug-2003
Citation: Van Kan, J.A., Bettiol, A.A., Watt, F. (2003-08-25). Three-dimensional nanolithography using proton beam writing. Applied Physics Letters 83 (8) : 1629-1631. ScholarBank@NUS Repository.
Abstract: Three-dimensional nanolithography was investigated using proton beam writing. When the proton beam interacts with matter it follows an almost straight path. It was observed that the secondary electrons induced by the primary proton beams have low energy and therefore limited range, resulting in minimal proximity effects.
Source Title: Applied Physics Letters
ISSN: 00036951
DOI: 10.1063/1.1604468
Appears in Collections:Staff Publications

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