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https://scholarbank.nus.edu.sg/handle/10635/97774
| Title: | Reconstruction of Ar depth profiles from PIXE measurements | Authors: | Osipowicz, T. Liew, S.C. Loh, K.K. Orlic, I. Tang, S.M. Weber, Th. |
Issue Date: | 2-Mar-1994 | Citation: | Osipowicz, T.,Liew, S.C.,Loh, K.K.,Orlic, I.,Tang, S.M.,Weber, Th. (1994-03-02). Reconstruction of Ar depth profiles from PIXE measurements. Nuclear Inst. and Methods in Physics Research, B 85 (1-4) : 499-502. ScholarBank@NUS Repository. | Abstract: | We report on the application of an iterative maximum likelihood algorithm [1] to the reconstruction of depth profiles from PIXE measurements. PIXE spectra of 450 and 800 keV Ar implanted Al samples were taken at 1.5 and 1.3 MeV He+ energy and at angles ranging from 18 to 83°. The measured Ar yields are in good agreement with those calculated by a PIXE simulation program. The reconstructed depth profiles are compared to those predicted by an ion implantation simulation code (TRIM). © 1994. | Source Title: | Nuclear Inst. and Methods in Physics Research, B | URI: | http://scholarbank.nus.edu.sg/handle/10635/97774 | ISSN: | 0168583X |
| Appears in Collections: | Staff Publications |
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