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Title: Reconstruction of Ar depth profiles from PIXE measurements
Authors: Osipowicz, T. 
Liew, S.C. 
Loh, K.K. 
Orlic, I. 
Tang, S.M. 
Weber, Th.
Issue Date: 2-Mar-1994
Citation: Osipowicz, T.,Liew, S.C.,Loh, K.K.,Orlic, I.,Tang, S.M.,Weber, Th. (1994-03-02). Reconstruction of Ar depth profiles from PIXE measurements. Nuclear Inst. and Methods in Physics Research, B 85 (1-4) : 499-502. ScholarBank@NUS Repository.
Abstract: We report on the application of an iterative maximum likelihood algorithm [1] to the reconstruction of depth profiles from PIXE measurements. PIXE spectra of 450 and 800 keV Ar implanted Al samples were taken at 1.5 and 1.3 MeV He+ energy and at angles ranging from 18 to 83°. The measured Ar yields are in good agreement with those calculated by a PIXE simulation program. The reconstructed depth profiles are compared to those predicted by an ion implantation simulation code (TRIM). © 1994.
Source Title: Nuclear Inst. and Methods in Physics Research, B
ISSN: 0168583X
Appears in Collections:Staff Publications

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