Please use this identifier to cite or link to this item:
|Title:||Reconstruction of Ar depth profiles from PIXE measurements||Authors:||Osipowicz, T.
|Issue Date:||2-Mar-1994||Citation:||Osipowicz, T.,Liew, S.C.,Loh, K.K.,Orlic, I.,Tang, S.M.,Weber, Th. (1994-03-02). Reconstruction of Ar depth profiles from PIXE measurements. Nuclear Inst. and Methods in Physics Research, B 85 (1-4) : 499-502. ScholarBank@NUS Repository.||Abstract:||We report on the application of an iterative maximum likelihood algorithm  to the reconstruction of depth profiles from PIXE measurements. PIXE spectra of 450 and 800 keV Ar implanted Al samples were taken at 1.5 and 1.3 MeV He+ energy and at angles ranging from 18 to 83°. The measured Ar yields are in good agreement with those calculated by a PIXE simulation program. The reconstructed depth profiles are compared to those predicted by an ion implantation simulation code (TRIM). © 1994.||Source Title:||Nuclear Inst. and Methods in Physics Research, B||URI:||http://scholarbank.nus.edu.sg/handle/10635/97774||ISSN:||0168583X|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Jun 21, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.