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Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/97774
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dc.titleReconstruction of Ar depth profiles from PIXE measurements
dc.contributor.authorOsipowicz, T.
dc.contributor.authorLiew, S.C.
dc.contributor.authorLoh, K.K.
dc.contributor.authorOrlic, I.
dc.contributor.authorTang, S.M.
dc.contributor.authorWeber, Th.
dc.date.accessioned2014-10-16T09:39:10Z
dc.date.available2014-10-16T09:39:10Z
dc.date.issued1994-03-02
dc.identifier.citationOsipowicz, T.,Liew, S.C.,Loh, K.K.,Orlic, I.,Tang, S.M.,Weber, Th. (1994-03-02). Reconstruction of Ar depth profiles from PIXE measurements. Nuclear Inst. and Methods in Physics Research, B 85 (1-4) : 499-502. ScholarBank@NUS Repository.
dc.identifier.issn0168583X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/97774
dc.description.abstractWe report on the application of an iterative maximum likelihood algorithm [1] to the reconstruction of depth profiles from PIXE measurements. PIXE spectra of 450 and 800 keV Ar implanted Al samples were taken at 1.5 and 1.3 MeV He+ energy and at angles ranging from 18 to 83°. The measured Ar yields are in good agreement with those calculated by a PIXE simulation program. The reconstructed depth profiles are compared to those predicted by an ion implantation simulation code (TRIM). © 1994.
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.description.sourcetitleNuclear Inst. and Methods in Physics Research, B
dc.description.volume85
dc.description.issue1-4
dc.description.page499-502
dc.description.codenNIMBE
dc.identifier.isiutNOT_IN_WOS
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