Please use this identifier to cite or link to this item:
https://doi.org/10.1109/LED.2009.2013731
Title: | Omega-gate p-MOSFET with nanowirelike SiGe/Si core/shell channel | Authors: | Jiang, Y. Singh, N. Liow, T.Y. Lim, P.C. Tripathy, S. Lo, G.Q. Chan, D.S.H. Kwong, D.-L. |
Keywords: | Hole quantum confinement Nanowire (NW) SiGe/Si Core/Shell Strain |
Issue Date: | 2009 | Citation: | Jiang, Y., Singh, N., Liow, T.Y., Lim, P.C., Tripathy, S., Lo, G.Q., Chan, D.S.H., Kwong, D.-L. (2009). Omega-gate p-MOSFET with nanowirelike SiGe/Si core/shell channel. IEEE Electron Device Letters 30 (4) : 392-394. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2009.2013731 | Abstract: | We demonstrated, for the first time, p-MOSFETs LG ≥ 40 nm with SiGe/Si core/shell channel integrated on bulk Si using a CMOS-compatible top-down processes. The Omega-shaped nanowire (NW)-like channels comprised of ∼12-nm-thick inner SiGe core and 4-nm-thick outer Si shell. The devices exhibited good subthreshold characteristics (with SS ∼128 mV/dec), suggesting successful surface passivation of the SiGe NW body by the outer Si capping layer. Drive currents of ∼167 μA/μm is achieved, which is 15% enhancement over the reference Si-channel devices fabricated by the same process. Double gm peaks are observed at low drain bias for the core/shell SiGe NW devices, confirming the quantum confinement of holes in the SiGe inner core. © 2009 IEEE. | Source Title: | IEEE Electron Device Letters | URI: | http://scholarbank.nus.edu.sg/handle/10635/82803 | ISSN: | 07413106 | DOI: | 10.1109/LED.2009.2013731 |
Appears in Collections: | Staff Publications |
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