Miniature scanning electron microscope design based upon the use of permanent magnets

Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.279395

Title:	Miniature scanning electron microscope design based upon the use of permanent magnets
Authors:	Khursheed, A. Thong, J.T.L. Phang, J.C.H. Ong, I.P.
Issue Date:	1997
Citation:	Khursheed, A., Thong, J.T.L., Phang, J.C.H., Ong, I.P. (1997). Miniature scanning electron microscope design based upon the use of permanent magnets. Proceedings of SPIE - The International Society for Optical Engineering 3155 : 175-184. ScholarBank@NUS Repository. https://doi.org/10.1117/12.279395
Abstract:	A table top SEM design has been presented which is based upon the use of permanent magnets. The SEM's height can be designed to be below 12 cm. Computer simulations predict that the SEM should be able to provide high spatial resolution and operate at primary beam voltages above 100 kV for thin specimens. ©2005 Copyright SPIE - The International Society for Optical Engineering.
Source Title:	Proceedings of SPIE - The International Society for Optical Engineering
URI:	http://scholarbank.nus.edu.sg/handle/10635/81537
ISSN:	0277786X
DOI:	10.1117/12.279395
Appears in Collections:	Staff Publications

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