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Title: Isolation process induced wafer warpage
Authors: Jang, S.-A.
Yeo, I.-S.
Kim, Y.-B.
Cho, B.-J. 
Lee, S.-K.
Issue Date: Jul-1998
Citation: Jang, S.-A.,Yeo, I.-S.,Kim, Y.-B.,Cho, B.-J.,Lee, S.-K. (1998-07). Isolation process induced wafer warpage. Electrochemical and Solid-State Letters 1 (1) : 46-48. ScholarBank@NUS Repository.
Abstract: Wafer warpage behavior during a local oxidation of silicon isolation process was investigated. Anisotropic etching of the front side nitride produced unbalanced stress states between front and back side nitride films, and caused a large wafer warpage. The maximum warpage was observed after field oxidation due to a wedge-effect of field oxide on the front side. Plastic deformation was shown to occur when the maximum warpage after field oxidation exceeded a critical value, although the warpage dramatically decreased after nitride stripping. © 1998 The Electrochemical Society, Inc.
Source Title: Electrochemical and Solid-State Letters
ISSN: 10990062
Appears in Collections:Staff Publications

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