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https://doi.org/10.1117/12.662495
Title: | Integrating photonic and microfluidic structures on a device fabricated using proton beam writing | Authors: | Bettiol, A.A. Teo, E.J. Udalagama, C.N.B. Venugopal Rao, S. Van Kan, J.A. Shao, P.G. Watt, F. |
Keywords: | Glass Microfluidics Proton beam writing Waveguides |
Issue Date: | 2006 | Citation: | Bettiol, A.A., Teo, E.J., Udalagama, C.N.B., Venugopal Rao, S., Van Kan, J.A., Shao, P.G., Watt, F. (2006). Integrating photonic and microfluidic structures on a device fabricated using proton beam writing. Proceedings of SPIE - The International Society for Optical Engineering 6186 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.662495 | Abstract: | Proton beam writing is a lithographic technique that can be used to fabricate microstructures in a variety of materials including PMMA, SU-8 and Foturan™. The technique utilizes a highly focused mega-electron volt beam of protons to direct write latent images into a material which are subsequently developed to form structures. Furthermore, the energetic protons can also be used to modify the refractive index of the material at a precise depth by using the end of range damage. In this paper we apply the proton beam writing technique to the fabrication of a lab-on-a-chip device that integrates buried waveguides with microfluidic channels. We have chosen to use Foturan™ photostructurable glass for the device because both direct patterning and refractive index modification is possible with MeV protons. | Source Title: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | http://scholarbank.nus.edu.sg/handle/10635/75238 | ISBN: | 081946242X | ISSN: | 0277786X | DOI: | 10.1117/12.662495 |
Appears in Collections: | Staff Publications |
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