Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.662495
Title: Integrating photonic and microfluidic structures on a device fabricated using proton beam writing
Authors: Bettiol, A.A. 
Teo, E.J. 
Udalagama, C.N.B. 
Venugopal Rao, S.
Van Kan, J.A. 
Shao, P.G. 
Watt, F. 
Keywords: Glass
Microfluidics
Proton beam writing
Waveguides
Issue Date: 2006
Citation: Bettiol, A.A., Teo, E.J., Udalagama, C.N.B., Venugopal Rao, S., Van Kan, J.A., Shao, P.G., Watt, F. (2006). Integrating photonic and microfluidic structures on a device fabricated using proton beam writing. Proceedings of SPIE - The International Society for Optical Engineering 6186 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.662495
Abstract: Proton beam writing is a lithographic technique that can be used to fabricate microstructures in a variety of materials including PMMA, SU-8 and Foturan™. The technique utilizes a highly focused mega-electron volt beam of protons to direct write latent images into a material which are subsequently developed to form structures. Furthermore, the energetic protons can also be used to modify the refractive index of the material at a precise depth by using the end of range damage. In this paper we apply the proton beam writing technique to the fabrication of a lab-on-a-chip device that integrates buried waveguides with microfluidic channels. We have chosen to use Foturan™ photostructurable glass for the device because both direct patterning and refractive index modification is possible with MeV protons.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/75238
ISBN: 081946242X
ISSN: 0277786X
DOI: 10.1117/12.662495
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