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|Title:||Automatic DRAM cell location in the SEM||Authors:||Thong, J.T.L.
|Issue Date:||1999||Citation:||Thong, J.T.L.,Zhu, Y.,Phang, J.C.H. (1999). Automatic DRAM cell location in the SEM. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 104-107. ScholarBank@NUS Repository.||Abstract:||The highly repetitive nature of a DRAM cell array requires the failure analyst to perform the tedious task of manually counting and tracking cells in order to locate on the die the position of a failed cell that has been identified through electrical testing. This paper describes a vision-based system that automates the task of cell location without the need for a high-accuracy specimen stage. The algorithm makes use of cross-correlation to track a moving die, and mimics the action that would otherwise be carried out by the SEM operator in locating a cell position.||Source Title:||Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA||URI:||http://scholarbank.nus.edu.sg/handle/10635/72498|
|Appears in Collections:||Staff Publications|
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