Please use this identifier to cite or link to this item: http://scholarbank.nus.edu.sg/handle/10635/72498
Title: Automatic DRAM cell location in the SEM
Authors: Thong, J.T.L. 
Zhu, Y. 
Phang, J.C.H. 
Issue Date: 1999
Source: Thong, J.T.L.,Zhu, Y.,Phang, J.C.H. (1999). Automatic DRAM cell location in the SEM. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 104-107. ScholarBank@NUS Repository.
Abstract: The highly repetitive nature of a DRAM cell array requires the failure analyst to perform the tedious task of manually counting and tracking cells in order to locate on the die the position of a failed cell that has been identified through electrical testing. This paper describes a vision-based system that automates the task of cell location without the need for a high-accuracy specimen stage. The algorithm makes use of cross-correlation to track a moving die, and mimics the action that would otherwise be carried out by the SEM operator in locating a cell position.
Source Title: Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
URI: http://scholarbank.nus.edu.sg/handle/10635/72498
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