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|Title:||Automatic DRAM cell location in the SEM|
|Authors:||Thong, J.T.L. |
|Source:||Thong, J.T.L.,Zhu, Y.,Phang, J.C.H. (1999). Automatic DRAM cell location in the SEM. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 104-107. ScholarBank@NUS Repository.|
|Abstract:||The highly repetitive nature of a DRAM cell array requires the failure analyst to perform the tedious task of manually counting and tracking cells in order to locate on the die the position of a failed cell that has been identified through electrical testing. This paper describes a vision-based system that automates the task of cell location without the need for a high-accuracy specimen stage. The algorithm makes use of cross-correlation to track a moving die, and mimics the action that would otherwise be carried out by the SEM operator in locating a cell position.|
|Source Title:||Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA|
|Appears in Collections:||Staff Publications|
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