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https://doi.org/10.1109/CLEO.2008.4551308
| Title: | Laser precision engineering from microfabrication to nanoprocessing | Authors: | Hong, M.H. Huang, Z.Q. Lin, Y. Yun, J. Tan, L.S. Shian, L. Chong, T.C. |
Issue Date: | 2008 | Citation: | Hong, M.H.,Huang, Z.Q.,Lin, Y.,Yun, J.,Tan, L.S.,Shian, L.,Chong, T.C. (2008). Laser precision engineering from microfabrication to nanoprocessing. 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS : -. ScholarBank@NUS Repository. https://doi.org/10.1109/CLEO.2008.4551308 | Abstract: | Laser precision engineering has unique advantages of non-contact process, flexible setup and high speed processing in air. In the last decades, we have witnessed its extensive applications in various production lines. Combined with other advanced processing tools, laser nanofabrication will play a much more important role in the next generation manufacturing. © 2008 IEEE. | Source Title: | 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS | URI: | http://scholarbank.nus.edu.sg/handle/10635/70765 | ISBN: | 1557528594 | DOI: | 10.1109/CLEO.2008.4551308 |
| Appears in Collections: | Staff Publications |
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