Please use this identifier to cite or link to this item: https://doi.org/10.1109/CLEO.2008.4551308
Title: Laser precision engineering from microfabrication to nanoprocessing
Authors: Hong, M.H. 
Huang, Z.Q.
Lin, Y. 
Yun, J.
Tan, L.S. 
Shian, L.
Chong, T.C. 
Issue Date: 2008
Source: Hong, M.H.,Huang, Z.Q.,Lin, Y.,Yun, J.,Tan, L.S.,Shian, L.,Chong, T.C. (2008). Laser precision engineering from microfabrication to nanoprocessing. 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS : -. ScholarBank@NUS Repository. https://doi.org/10.1109/CLEO.2008.4551308
Abstract: Laser precision engineering has unique advantages of non-contact process, flexible setup and high speed processing in air. In the last decades, we have witnessed its extensive applications in various production lines. Combined with other advanced processing tools, laser nanofabrication will play a much more important role in the next generation manufacturing. © 2008 IEEE.
Source Title: 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS
URI: http://scholarbank.nus.edu.sg/handle/10635/70765
ISBN: 1557528594
DOI: 10.1109/CLEO.2008.4551308
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