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https://doi.org/10.1117/12.456805
| Title: | An overview of laser microprocessing in data storage industry | Authors: | Chong, T.C. Lu, Y.F. |
Keywords: | Data storage Laser bumping Laser cleaning Laser microprocessing Laser nanoprocessing Laser texturing |
Issue Date: | 2002 | Citation: | Chong, T.C., Lu, Y.F. (2002). An overview of laser microprocessing in data storage industry. Proceedings of SPIE - The International Society for Optical Engineering 4426 : 17-24. ScholarBank@NUS Repository. https://doi.org/10.1117/12.456805 | Abstract: | An overview of laser microprocessing in data storage industry was presented. Real-time monitoring of laser surface processing was investigated to improve the performance of laser microprocessing technology. Laser nano-etching and nanolithography were realized by atomic force microscopy (AFM) tip-enhanced laser irradiation through combination of laser microprocessing and scanning profile microscope (SPM) techniques. | Source Title: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | http://scholarbank.nus.edu.sg/handle/10635/69362 | ISSN: | 0277786X | DOI: | 10.1117/12.456805 |
| Appears in Collections: | Staff Publications |
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