Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.456805
Title: An overview of laser microprocessing in data storage industry
Authors: Chong, T.C. 
Lu, Y.F. 
Keywords: Data storage
Laser bumping
Laser cleaning
Laser microprocessing
Laser nanoprocessing
Laser texturing
Issue Date: 2002
Source: Chong, T.C., Lu, Y.F. (2002). An overview of laser microprocessing in data storage industry. Proceedings of SPIE - The International Society for Optical Engineering 4426 : 17-24. ScholarBank@NUS Repository. https://doi.org/10.1117/12.456805
Abstract: An overview of laser microprocessing in data storage industry was presented. Real-time monitoring of laser surface processing was investigated to improve the performance of laser microprocessing technology. Laser nano-etching and nanolithography were realized by atomic force microscopy (AFM) tip-enhanced laser irradiation through combination of laser microprocessing and scanning profile microscope (SPM) techniques.
Source Title: Proceedings of SPIE - The International Society for Optical Engineering
URI: http://scholarbank.nus.edu.sg/handle/10635/69362
ISSN: 0277786X
DOI: 10.1117/12.456805
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