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|Title:||An overview of laser microprocessing in data storage industry|
|Authors:||Chong, T.C. |
|Citation:||Chong, T.C., Lu, Y.F. (2002). An overview of laser microprocessing in data storage industry. Proceedings of SPIE - The International Society for Optical Engineering 4426 : 17-24. ScholarBank@NUS Repository. https://doi.org/10.1117/12.456805|
|Abstract:||An overview of laser microprocessing in data storage industry was presented. Real-time monitoring of laser surface processing was investigated to improve the performance of laser microprocessing technology. Laser nano-etching and nanolithography were realized by atomic force microscopy (AFM) tip-enhanced laser irradiation through combination of laser microprocessing and scanning profile microscope (SPM) techniques.|
|Source Title:||Proceedings of SPIE - The International Society for Optical Engineering|
|Appears in Collections:||Staff Publications|
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