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Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.456805
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dc.titleAn overview of laser microprocessing in data storage industry
dc.contributor.authorChong, T.C.
dc.contributor.authorLu, Y.F.
dc.date.accessioned2014-06-19T02:59:49Z
dc.date.available2014-06-19T02:59:49Z
dc.date.issued2002
dc.identifier.citationChong, T.C., Lu, Y.F. (2002). An overview of laser microprocessing in data storage industry. Proceedings of SPIE - The International Society for Optical Engineering 4426 : 17-24. ScholarBank@NUS Repository. https://doi.org/10.1117/12.456805
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/69362
dc.description.abstractAn overview of laser microprocessing in data storage industry was presented. Real-time monitoring of laser surface processing was investigated to improve the performance of laser microprocessing technology. Laser nano-etching and nanolithography were realized by atomic force microscopy (AFM) tip-enhanced laser irradiation through combination of laser microprocessing and scanning profile microscope (SPM) techniques.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.456805
dc.sourceScopus
dc.subjectData storage
dc.subjectLaser bumping
dc.subjectLaser cleaning
dc.subjectLaser microprocessing
dc.subjectLaser nanoprocessing
dc.subjectLaser texturing
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1117/12.456805
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume4426
dc.description.page17-24
dc.description.codenPSISD
dc.identifier.isiut000176422100003
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