Please use this identifier to cite or link to this item:
https://doi.org/10.1109/IPFA.2006.250996
| Title: | A spectroscopic SEM: First results | Authors: | Osterberg, M. Khursheed, A. |
Issue Date: | 2006 | Citation: | Osterberg, M.,Khursheed, A. (2006). A spectroscopic SEM: First results. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 54-57. ScholarBank@NUS Repository. https://doi.org/10.1109/IPFA.2006.250996 | Source Title: | Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA | URI: | http://scholarbank.nus.edu.sg/handle/10635/69084 | ISBN: | 1424402069 | DOI: | 10.1109/IPFA.2006.250996 |
| Appears in Collections: | Staff Publications |
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