Please use this identifier to cite or link to this item: https://doi.org/10.1109/IPFA.2006.250996
DC FieldValue
dc.titleA spectroscopic SEM: First results
dc.contributor.authorOsterberg, M.
dc.contributor.authorKhursheed, A.
dc.date.accessioned2014-06-19T02:56:39Z
dc.date.available2014-06-19T02:56:39Z
dc.date.issued2006
dc.identifier.citationOsterberg, M.,Khursheed, A. (2006). A spectroscopic SEM: First results. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 54-57. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IPFA.2006.250996" target="_blank">https://doi.org/10.1109/IPFA.2006.250996</a>
dc.identifier.isbn1424402069
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/69084
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1109/IPFA.2006.250996
dc.sourceScopus
dc.typeConference Paper
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.doi10.1109/IPFA.2006.250996
dc.description.sourcetitleProceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
dc.description.page54-57
dc.identifier.isiutNOT_IN_WOS
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