Please use this identifier to cite or link to this item: https://doi.org/10.1109/IPFA.2006.250996
Title: A spectroscopic SEM: First results
Authors: Osterberg, M. 
Khursheed, A. 
Issue Date: 2006
Source: Osterberg, M.,Khursheed, A. (2006). A spectroscopic SEM: First results. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 54-57. ScholarBank@NUS Repository. https://doi.org/10.1109/IPFA.2006.250996
Source Title: Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
URI: http://scholarbank.nus.edu.sg/handle/10635/69084
ISBN: 1424402069
DOI: 10.1109/IPFA.2006.250996
Appears in Collections:Staff Publications

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