A near-infrared, continuous wavelength, in-lens spectroscopic photon emission microscope system

Please use this identifier to cite or link to this item: https://doi.org/10.1109/IPFA.2007.4378092

Title:	A near-infrared, continuous wavelength, in-lens spectroscopic photon emission microscope system
Authors:	Tan, S.L. Toh, K.H. Phang, J.C.H. Chan, D.S.H. Chua, C.M. Koh, L.S.
Issue Date:	2007
Citation:	Tan, S.L.,Toh, K.H.,Phang, J.C.H.,Chan, D.S.H.,Chua, C.M.,Koh, L.S. (2007). A near-infrared, continuous wavelength, in-lens spectroscopic photon emission microscope system. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 240-244. ScholarBank@NUS Repository. https://doi.org/10.1109/IPFA.2007.4378092
Abstract:	A near-infrared continuous wavelength, in-lens spectroscopic photon emission microscope has been developed. The dispersive element is a three-element prism which has been specially designed to disperse light from 0.9 μm to 1.6 μm about the optical axis. The system has been used to perform frontside and backside spectroscopy on forward and reverse-biased p-n junctions and saturated nMOSFETs. The difference in the frontside and backside spectra is due to the "silicon filter effect" for the backside spectra and the optical effects of the dielectrics for the frontside spectra. © 2007 IEEE.
Source Title:	Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
URI:	http://scholarbank.nus.edu.sg/handle/10635/68906
ISBN:	1424410142
DOI:	10.1109/IPFA.2007.4378092
Appears in Collections:	Staff Publications

There are no files associated with this item.

Check