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|Title:||A near-infrared, continuous wavelength, in-lens spectroscopic photon emission microscope system|
|Source:||Tan, S.L.,Toh, K.H.,Phang, J.C.H.,Chan, D.S.H.,Chua, C.M.,Koh, L.S. (2007). A near-infrared, continuous wavelength, in-lens spectroscopic photon emission microscope system. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 240-244. ScholarBank@NUS Repository. https://doi.org/10.1109/IPFA.2007.4378092|
|Abstract:||A near-infrared continuous wavelength, in-lens spectroscopic photon emission microscope has been developed. The dispersive element is a three-element prism which has been specially designed to disperse light from 0.9 μm to 1.6 μm about the optical axis. The system has been used to perform frontside and backside spectroscopy on forward and reverse-biased p-n junctions and saturated nMOSFETs. The difference in the frontside and backside spectra is due to the "silicon filter effect" for the backside spectra and the optical effects of the dielectrics for the frontside spectra. © 2007 IEEE.|
|Source Title:||Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA|
|Appears in Collections:||Staff Publications|
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