Please use this identifier to cite or link to this item:
Title: Characterization of coplanar waveguides on MCM-D silicon substrate
Authors: Liu, L. 
Lin, F. 
Kooi, P.S. 
Leong, M.S. 
Issue Date: 1999
Citation: Liu, L.,Lin, F.,Kooi, P.S.,Leong, M.S. (1999). Characterization of coplanar waveguides on MCM-D silicon substrate. Asia-Pacific Microwave Conference Proceedings, APMC 3 : 865-868. ScholarBank@NUS Repository.
Abstract: This paper presents the characteristics of the coplanar waveguides (CPW) on silicon substrate fabricated through MCM-D process. The propagation constant and characteristic impedance are measured at frequencies from 0.05 GHz to 10.05 GHz, using a vector analyzer, and with LRRM on-wafer calibration techniques followed with de-embedding procedure. Two quasi-TEM models are developed to account for the EM affects in the CPW structure: the distributed equivalent elements RLGC were modeled by both closed-form approximation and fully lumped-equivalent circuits. The calculated characteristics show good agreement with the measured ones. The proposed models should be useful for the analysis and design of RFIC on silicon.
Source Title: Asia-Pacific Microwave Conference Proceedings, APMC
Appears in Collections:Staff Publications

Show full item record
Files in This Item:
There are no files associated with this item.

Page view(s)

checked on Jan 11, 2021

Google ScholarTM


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.