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|Title:||Characterization of coplanar waveguides on MCM-D silicon substrate|
|Authors:||Liu, L. |
|Citation:||Liu, L.,Lin, F.,Kooi, P.S.,Leong, M.S. (1999). Characterization of coplanar waveguides on MCM-D silicon substrate. Asia-Pacific Microwave Conference Proceedings, APMC 3 : 865-868. ScholarBank@NUS Repository.|
|Abstract:||This paper presents the characteristics of the coplanar waveguides (CPW) on silicon substrate fabricated through MCM-D process. The propagation constant and characteristic impedance are measured at frequencies from 0.05 GHz to 10.05 GHz, using a vector analyzer, and with LRRM on-wafer calibration techniques followed with de-embedding procedure. Two quasi-TEM models are developed to account for the EM affects in the CPW structure: the distributed equivalent elements RLGC were modeled by both closed-form approximation and fully lumped-equivalent circuits. The calculated characteristics show good agreement with the measured ones. The proposed models should be useful for the analysis and design of RFIC on silicon.|
|Source Title:||Asia-Pacific Microwave Conference Proceedings, APMC|
|Appears in Collections:||Staff Publications|
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