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Title: A theoretical model for laser cleaning of microparticles in a thin liquid layer
Authors: Lu, Y.-F. 
Zhang, Y.
Song, W.-D. 
Chan, D.S.H. 
Keywords: Adhesion force
Cleaning force
Saturation vapor pressure
Steam laser cleaning
Stress wave
Issue Date: 1-Nov-1998
Citation: Lu, Y.-F.,Zhang, Y.,Song, W.-D.,Chan, D.S.H. (1998-11-01). A theoretical model for laser cleaning of microparticles in a thin liquid layer. Japanese Journal of Applied Physics, Part 2: Letters 37 (11 PART A) : L1330-L1332. ScholarBank@NUS Repository.
Abstract: A theoretical model for removal of tiny particles from solid surface by laser cleaning with a thin liquid layer is established by taking adhesion force and cleaning force into account. When pulsed laser irradiates on the solid surface coated with a thin liquid film, a sheet of liquid near the liquid/substrate interface can be superheated through thermal diffusion. The rapid growth of vapor bubbles inside the superheated liquid can generate transient stress wave with high pressure, large enough to expel micron and sub-micron particles from the contaminated surface. Through calculating adhesion force and cleaning force, the cleaning threshold of laser fluence can be predicted from this theoretical model and the difference between cleaning force and adhesion force increases with increasing of laser fluence, leading to higher cleaning efficiency.
Source Title: Japanese Journal of Applied Physics, Part 2: Letters
ISSN: 00214922
Appears in Collections:Staff Publications

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